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The letter presents the investigation of the temperature dependence of the charging mechanism of dielectric layer in radio frequency microelectromechanical system switch. The accumulated charge kinetics are monitored through the transient response of device capacitance when a bias greater than pull-in is applied. The capacitance transient response is shown to follow a stretched exponential law. The “time scale” of the stretched exponential process is found to be thermally activated, with an activation energy that is determined from Arrhenius plot.

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