It is designed a Fast Tool Servo (FTS) device which based on piezoelectric ceramic and jointed by flexible hinge. The flexible hinge has been analyzed and optimized both by the theoretical calculation and finite element analysis; and it has been physically manufactured and tested by means of pressure sensor and laser interferometer. The stiffness model was established. The driving voltage and displacement relationship has been revealed. The results indicate that this FTS system can reach a travel range for 60μm,the frequency response precedes 150Hz within 39μm travel range.

With the double-nozzle NFES process, the uncertainty is more suitable to investigate than the multi-nozzle NFES and also meet higher liquid throughput requirement than conventional electrospinning. Moreover, the key point is to control the deposition characteristics of double-nozzle NFES under the interaction of the nozzles. This paper simulates the change in electric field intensity with the change of nozzle length and voltage. The experiment shows that the deposition distance becomes smaller when needle length increases, however, the influence of voltage is opposite in certain range. According to the study above, the results could be the guidance of the multi-nozzles NEFS in manufacturing process, and also can illustrate the force distribution of the jet with further modification.

The Fast-Tool-Servo (FTS) is widely used for micro-structure manufacturing especially for micro optical lens. The working principle of FTS presented by Qiang Liu et.al is that, a voice coil motor and a piezoelectric（PZT） actuator are used as the driving elements, and two flexure hinges are developed as the guide mechanisms. However, vertical displacement jump happens when the flexure hinges are driven by a voice coil motor or a piezoelectric actuator. In this paper, a new amplified structure is presented, allowing the horizontal motion while reducing the vertical displacement jump. The working principle is that, the piezoelectric actuator is applied to a beam which has two flexure hinges, one is linked to the frame, and the other is linked to a tool holder which is situated through two parallel membranes. When the piezoelectric actuator deforms, the beam will rotate around the frame, while the displacement is amplified at the other end, causing the tool holder’s motion and the membranes are forced to bend, while the vertical motion is restrained by the membranes. As a result, the presented membrane based flexure structure is able to amplify the motion of the piezoelectric actuator. In addition, the vibration frequency of the membrane is easy to be adjusted by the preloaded force. It is important to know when the FTS is working at different frequency. The performance of the presented structure is analyzed by structural dynamics coupled with piezoelectric, and the parameters of the structure are optimized to remain linear relation between the tool holder and the piezoelectric actuator, while the vertical displacement jump is much smaller than the structure presented in reference.

The Fast Tool Servo (FTS) is widely used for the machining of micro-structures, especially for optical micro lens array. The working principle of FTS is that a voice coil motor or a piezoelectric (PZT) actuator is used as the driving elements, and the flexure hinges are developed as the guide mechanisms. In addition, an optical encoder is applied to measure the displacement. However, the existing design of FTS is too complicated and expensive. One reason is that the stroke of the FTS for the fabrication of optical micro lens array is only a few hundred micrometers, while its precision reaches to nanometric range, thus the optical encoder in not applicable. On the other hand, there exists sluggish and creep for piezoelectric materials, which makes the control of displacement difficult. This paper develops a displacement sensor embedded voice coil motor. In the design, the driving element is ampere force of the voice coil motor which is a linear ratio to the input current. Both the two covers are thin plates which serve as compliant mechanism by supporting the deformation at the Radial direction and provide linear stiffness in the axial direction. Therefore, the output displacement is proportional to the ampere force. The existence of external force affects the actual displacement, an embedded capacitor serves as displacement sensor will detects the real displacement, and the external force can be estimated by the current and measured displacement, which makes the motion control easy. At the same time, a multiphysics model of the developed FTS is built in this study by using finite element method and the displacement control under different cutting force is studied. The experimental results show that the developed FTS is efficient for achieving short stroke with high precision.

Optical encoders have been used for decades as displacement measuring devices. As far as image measurement is concerned, CCD and CMOS are gradually used in metrology fields. In practice, performance of image ultraprecise optical encoders are related to environmental temperature, humidity, data processor speed, and vibration, thus measurement precision of encoders will be affected, and these factors limit their usage scale. Among these factors, the vibration is the largest effect factor. Here, a new experiment system was built to study vibration effect of measurement. Experiments indicated that the effects of vibration mainly exist in two aspects. Firstly, vibration induced deformation of glass grating, so distance of adjacent grating lines got uncertain. Secondly, random vibration affected CMOS image sharpness, and it reduced accuracy of encoding and decoding. Finally, some methods are provided to reduce the vibration of the grating encoder.