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The perpendicular magnetic anisotropy of CoPtCr films deposited on Ru seed layers is discussed as a function of film composition. Moreover, the change in by the addition of SiO 2 is examined in light of thermal stability of CoPtCr-SiO 2 media. The of Co-10 at % Cr shows a high value of 5 10 6 erg cm 3 , which is much higher than that reported by Bolzoni et al. The addition of Pt to the Co-10 at % Cr film results in a further enhancement of . A maximum of nearly 10 10 6 erg cm 3 is observed at 25 30 at % Pt. All series of films with various Cr contents show maximum values of at 25 30 at % Pt. The maximum value for CoPt (Cr = 0) films reaches 15 10 6 erg cm 3 . The value of magnetocrystalline anisotropy of grains, calculated by taking account of the volume fraction of CoPtCr grains, decreases as the SiO 2 content increases. However, the maintains a large value of more than 7 10 6 erg cm 3 , even at 10 at % SiO 2 in addition to (Co 90 Cr 10 ) 80 Pt 20 , which indicates a high potential of CoPtCr-SiO 2 media to resist thermal agitation of magnetization.Index Terms-CoPtCr films, CoPtCr-SiO 2 media, perpendicular magnetic anisotropy, Ru seed layer, thermal agitation of magnetization.

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