In this paper we present a precise analytical model for high performance capacitive RF MEMS switch design. Based on this model, the parameters that can influence the switch performance are discussed. The most important geometric parameters are membrane length and thickness, the distance between membrane and lower electrode, the lower electrode length, and the membrane material stress. A capacitive RF switch with optimized structure and expected to actuated with low operation voltage was proposed. The membrane and the lower electrode length are 400μτη and 180μτη respectively. Aluminum is used as metallic structure materials.Measurement result shows the switch can be actuated with a voltage of 12.3 V.

The development of Micro-ElectroMechanical Systems ,integrated circuits, wireless communications have resulted in the creation of miniature, ultra-low power, and wearable health monitoring system. The system can be defined as a Body Sensor Network that can be embedded in the user’s outfit as a part of the clothing .This 3ACare system is a wearable health monitoring and alert system which can give anyone health care at anytime and anywhere. The system continuously collects multiple vital signs by physiological sensors and evaluates the signs in a personal server such as a PDA. And the personal server transfers the data to a medical server center by 3G net or Internet. The doctor in the medical server center will give the patients message after they diagnosed the data.The paper describes the architecture of 3ACare and the details of the wireless body sensor network (WBSN) nodes and the test result.

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Two kinds of fabrication schematics of micro perforated panel (MPP) based on MEMS technology is expatiated in the article. MPP has been widely used to reduce noise, and theory reveals that better ability of sound absorption of the MPP will be getting by means of reducing the diameters and increasing the dense of the perforators properly. Small error of the dimension will decline the sound absorption seriously on such a scale. MEMS technology is applied to fabricate the micro perforated panel which is hard to be realized utilize machine. The parameters are calculated based on the theory of Maa D-Y to obtain a kind of wide band, high sound absorption structure. The computer simulation is also conducted to forecast the capability of the MPP and the experiment result shows the accordance with the simulations.

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