2006
DOI: 10.1088/0960-1317/16/8/006
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A fabrication process for CrN/TiAlN multi-layered strain gauges on mild steel

Abstract: A fabrication process for CrN/TiAlN thin film multi-layered strain gauges on mild steel was developed using shadow masking during cathodic arc evaporation. The strain gauge was electrically insulated from the mild steel with an AlN thin film deposited reactively using partial filtered arc deposition and a simple shielding technique. Gauge factors of around 3.5 were obtained with hysteresis and creep characteristics for loads exceeding 1880 micro strain.

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