A spectrometer for low energy heavy ion ERDA

18O/16O isotopic separation in anodic tantala films by glow discharge time‐of‐flight mass spectrometry

“…The scattered recoils were identified by the combination of a TOF spectrometer with a gas ionisation chamber; [17] the data were analysed by means of the Data Furnace code. [18] Additional TOF-SIMS examination of the specimens was employed to determine the distribution of 18 O/ 16 O isotopes for comparison.…”

Depth resolution of TOF-ERDA using a He beam

“…One of the advantages of TOF-ERDA using a heavy ion beam is that good depth resolution can be obtained. The depth resolution of 1.5 nm was reported for oxygen by use of a 127 I beam [4]. However the incident heavy ion may introduce the irradiation damage during the measurement.…”

“…Besides, the energy straggling of recoil ions in the stopper foil deteriorates depth resolution. A time-of-flight (TOF) ERDA is one of the promising methods for the measurements with mass separation of recoil particles and with better depth resolution [1][2][3][4]. Simultaneous measurements of velocity and energy enable the determination of the mass of recoil particle.…”

“…Since the stopper foil is not used, depth resolution is superior to that of conventional ERDA. A number of measurements by means of TOF-ERDA were reported, and heavy ions were used as incident beams in most cases [1][2][3][4]. One of the advantages of TOF-ERDA using a heavy ion beam is that good depth resolution can be obtained.…”

Digitizing data acquisition and time-of-flight pulse processing for ToF-ERDA

“…Gas ionization chambers (GIC) with thin entrance windows are used in increasing numbers in ToF-ERDA spectrometers as the energy detector [4,5]. In order to exploit the capabilities of even a simple planar electrode GIC, signals should be captured also from other electrodes than the anode, and advanced pulse shaping methods used to analyze those signals.…”