A zipper-action differential micro-mechanical tunable capacitor

Ionis, G.V.; Dec, A.; Suyama, K.

doi:10.1109/memsc.2001.992735

Cited by 13 publications

(10 citation statements)

References 8 publications

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“…Efforts have been put forth to suppress the effect of pull-in and many ideas have been proposed including for example supporting beam arrays [3], separate actuation and capacitance electrodes [4], leveraged bending [5], dimples [6], the zipping motion [7], or using three plates rather than two [8]. Although these methods were successful in suppressing the effect of pull-in, they do impose other challenges.…”

Section: Introductionmentioning

confidence: 99%

Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Elshurafa

Radwan

et al. 2012

Micro Nano Lett.

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Section: Introductionmentioning

confidence: 99%

Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Elshurafa

Radwan

et al. 2012

Micro Nano Lett.

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“…A linear TR of 25% (77% total TR) was achieved, although no RF measurements were reported as the prototypes were designed as proof-of-concept devices. Subsequent varactors of similar design have been reported by others [17][18][19]. Zipping varactors with curved cantilevers operating in a 'fixed-free' configuration have also been fabricated.…”

Section: Introductionmentioning

confidence: 87%

Stable zipping RF MEMS varactors

Holmes²,

Yeatman³

et al. 2010

J. Micromech. Microeng.

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Novel zipper varactors with the potential for achieving large tuning ranges have been fabricated and characterized. These varactors have a curved cantilever electrode that is actuated by a single pull-down electrode. The shape of the cantilever is designed such that its local stiffness is tailored to enable extended stable zipping. In a series-mounted varactor, the measured capacitance ratio was 16.5 for actuation voltages between 0 and 46 V. However, the presence of an unexpected tuning instability at 32 V bias limited the practical tuning range in this varactor. This behaviour was attributed to fabrication imperfections. The first electrical self-resonant frequency of the same varactor was extrapolated to be 72.6 and 17.2 GHz at 20 and 329 fF, respectively. In a different shunt-mounted varactor, the quality factor (Q) was measured to be 91 (60 fF) and 176 (600 fF) at 2 GHz. Including the anchor, the varactors have a small device footprint and fit within an area of 500 by 100 μm.

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“…Several electrostatic MEMS variable capacitors were demonstrated in the past few years and various designs were developed to increase the analog range [3]- [8] including the zipper actuation principle [3]- [5]. For zipper-based devices, and in order to avoid a direct contact between the beam and the bottom electrode, a dimple-based has been used at the expense of a lower capacitance ratio [3]- [4]. …”

Section: Introductionmentioning

confidence: 99%

Electrostatic RF MEMS tunable capacitors with analog tunability and low temperature sensitivity

Mahameed

Rebeiz

2010

2010 IEEE MTT-S International Microwave Symposium

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This work presents novel RF MEMS tunable capacitors with very lo w temperature sensitivity. The designs have separate and interdigitated RF and actuation electrodes which prevents dielectric charging under high actuation voltages.It also increases the capacitance ratio and the tunable analog range. Two devices with different mechanical operating principles are fabricated on a quartz substrate and result in a capacitance ratio 2.8-3.3 (Cmin=90-100 fF, Cmax=280-310 fF) and with a Q > 100 at 5 GHz. The designs also exhibit measured pull in voltage variation of < 50 m V foe at 20-120°C.

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A zipper-action differential micro-mechanical tunable capacitor

Cited by 13 publications

References 8 publications

Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Stable zipping RF MEMS varactors

Electrostatic RF MEMS tunable capacitors with analog tunability and low temperature sensitivity

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