Acoustic Sensors for Biomedical Applications

Abstract

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Ring-Shaped Sensitive Element Design for Acceleration Measurements: Overcoming the Limitations of Angular-Shaped Sensors

“…As shown in Figure 1, the pendulum type sensitive micromechanical accelerometer (MMA) consists of a quartz ST-cut console (1), rigidly fixed at one end and loaded with inertial mass (IM) (2) at the other end. On the opposite surfaces of the SE console, reflectors (3) and inter-digital transducers (IDT) (4), each operating at their own frequency, are located.…”

“…In the above design (see Figure 2), external acceleration is applied along the Z axis and leads to the deformation of the piezoelectric console (2). This in turn leads to the frequency adjustment of the opposite SAW resonators (4).…”

“…Moreover, the ring-shaped design provides a uniform distribution of stresses and relative deformations in the SAW-resonator deposition area and reduced error levels due to its lower cross sensitivity. In the above design (see Figure 2), external acceleration is applied along the Z axis and leads to the deformation of the piezoelectric console (2). This in turn leads to the frequency adjustment of the opposite SAW resonators (4).…”

“…In recent years, integrated micromechanical solutions based on surface acoustic waves (SAW) resonance principles have attracted broad interest and suggested several potential applications, including biomedical and/or sports wearable devices [1,2]; vehicular designs, [3,4] including UAVs [5]; and temperature sensors [6][7][8]. In the current literature, various aspects of SAW sensor design and its manufacturing technology have been investigated thoroughly.…”

The Sensitive Element of Acoustic Sensor on Circular Polarized Waves: From Theoretical Considerations towards Perspective Rotation Rate Sensors Design

“…That is the reason why interest in the research of the features of acoustic waves propagation under rotation and its use for motion parameter sensors development has increased in recent decades. Such studies have been carried out both for surface (SAW) and bulk (BAW) acoustic waves [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ].…”