1996
DOI: 10.1007/bf00820157
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Analysis of microwave propagation effects using two-dimensional electrooptic field mapping techniques

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Cited by 17 publications
(4 citation statements)
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“…To access the lowestlevel conductors in LSIs with multi-level interconnections, a focused ion beam was used to make tungsten via-holes and pads especially for EO probing [52]. The other new feature is two-dimensional field mapping [53,54]. A photonic field-probing technique is less invasive than inductive probing and makes higher spatial resolutions possible.…”
Section: Ic Testing Systemmentioning
confidence: 99%
“…To access the lowestlevel conductors in LSIs with multi-level interconnections, a focused ion beam was used to make tungsten via-holes and pads especially for EO probing [52]. The other new feature is two-dimensional field mapping [53,54]. A photonic field-probing technique is less invasive than inductive probing and makes higher spatial resolutions possible.…”
Section: Ic Testing Systemmentioning
confidence: 99%
“…The work of G. David lithic microwave integrated circuits using the substrate of the circuits as the sensor element (internal electrooptic sampling). These measurements have revealed information for circuit characterization and failure detection [6]- [8] and could be used for verification of electromagnetic simulations. If the substrate does not exhibit the linear electrooptic effect and, moreover, when field patterns outside the substrate need to be known, external electrooptic sampling has to be used.…”
Section: Introductionmentioning
confidence: 99%
“…Electrooptic measurements can be divided into two schemes, with the implementation depending on the device-under-test (DUT). For microwave structures fabricated on substrates that exhibit linear electrooptic effects, such as GaAs and InP, the internal electrooptic sampling method has proven to be quite effective [6]- [8]. If the substrate does not exhibit such an electrooptic effect and, moreover, when radiation field patterns are to be investigated, it is necessary to utilize external electrooptic sampling.…”
Section: Introductionmentioning
confidence: 99%