Boron-doped vapor-deposited diamond temperature microsensors

Aslam, M.; Yang, G. S.; Masood, A.

doi:10.1016/0924-4247(94)00830-2

Cited by 35 publications

(7 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Therefore, short response times can be expected. Furthermore, the TCR of platinum is 3.85 × 10 −3 K −1 , whereas typical values for B-doped diamond thermistors are in the range −5 × 10 −3 K −1 -−1 × 10 −2 K −1 (Aslam et al 1994, Werner 1998) depending on the doping concentration and compensation. Jones (1992) suggested that self-heated diamond thermistors can be used for hostile liquid level sensing.…”

Section: Diamond Sensorsmentioning

confidence: 99%

Growth and application of undoped and doped diamond films

Werner¹,

Locher

1998

Rep. Prog. Phys.

View full text Add to dashboard Cite

Diamond is a unique material with several outstanding physical and chemical properties. It has the highest thermal conductivity at room temperature and it is transparent from the UV to the far IR. Furthermore it has the highest hardness, the highest Young's modulus and it is chemically inert and radiation hard. These and other properties of diamond are of great interest for various commercial applications. Much progress has been made in the last decade to produce diamond with chemical vapour deposition (CVD) techniques. Today, CVD diamond plates of more than 10 cm in diameter and more than 1 mm in thickness are commercially available whose properties, especially the optical and thermal ones, are comparable to the best single-crystal diamonds.In this overview, the historical development of CVD diamond deposition with the main focus on the most important techniques, hot-filament and microwave assisted CVD, will be resumed. We describe the control of structural and morphological properties during the deposition which is a prerequisite of oriented growth and the doping of diamond which is needed for semiconductor and sensor applications.The second part of this overview will discuss optical, thermal, thermomechanical and electronic properties of single-crystal diamond and CVD diamond. Finally, we give a description of several applications such as IR windows, heatspreaders, temperature sensors, piezoresistive sensors, diodes and transistors.

show abstract

Section: Diamond Sensorsmentioning

confidence: 99%

Growth and application of undoped and doped diamond films

Werner¹,

Locher

1998

Rep. Prog. Phys.

View full text Add to dashboard Cite

show abstract

“…Positive photoresist mixed with diamond powder having an average particle size of 0.1 m [12], [13] is spin-coated and patterned using a standard lithographic process. The sample is then heated to 900 C resulting in evaporation of photoresist leaving behind the diamond particles which act as seeds for diamond growth in a hot filament CVD (HFCVD) reactor [10], [12], [13]. The in situ doping of an approximately 1-m thick diamond film is accomplished using pure boron powder which is heated to 900 C The film resistivity, as measured by the four-point probe method, is approximately 27 cm.…”

Section: Sample Fabricationmentioning

confidence: 99%

“…A double-layer process was developed to suppress the diamond particles in undesired areas. The earlier patterning method [13] and the double-layer modification are shown in Fig. 4(a) and (b), respectively.…”

Section: Sample Fabricationmentioning

confidence: 99%

Poly-diamond gated field-emitter display cells

Hong

Aslam

1999

IEEE Trans. Electron Devices

View full text Add to dashboard Cite

A microchip containing gated field-emitter display (FED) cells is designed and fabricated using vapor-deposited ptype polycrystalline diamond films and employing an integrated circuit (IC)-compatible diamond film technology on oxidized 4in Si wafers. Current-voltage (I0V ) data, measured in a diode configuration at 10 06 torr, show Fowler-Nordheim (F-N) field emission behavior. A 1 2 4 pixel diamond gated display cell is demonstrated for the first time using phosphor-coated glass as an anode.Index Terms-CVD diamond films, diamond technology, field emission display.

show abstract

“…As a material for microsensors, diamond thin film offers certain benefits, such as robustness to high temperatures and chemically harsh environments [2]. Thermistors [3], [4], pressure sensors [5], flow sensors [6], and chemical sensors [7], [8] such diamond sensors. The hardness and high wear resistance of diamond offers great potential for use in movable microstructures or parts that must come into contact with other materials.…”

Section: Introductionmentioning

confidence: 99%

Micromachining of diamond film for MEMS applications

Shibata

Kitamoto

Unno

et al. 2000

J. Microelectromech. Syst.

View full text Add to dashboard Cite

We realized two diamond microdevices: a movable diamond microgripper and a diamond probe for an atomic force microscope (AFM), consisting of a V-shaped diamond cantilever and a pyramidal diamond tip, using a microfabrication technique employing semiconductive chemical-vapor-deposited diamond thin film. The microgripper was fabricated by patterning diamond thin film onto a sacrificial SiO 2 layer by selective deposition and releasing the movable parts by sacrificial layer etching. The diamond AFM probe was fabricated by combining selective deposition for patterning a diamond cantilever with a mold technique on an Si substrate for producing a pyramidal diamond tip. The cantilever was then released by removing the substrate. We report the initial results obtained in AFM measurements taken using the fabricated diamond probe. These results indicate that this diamond probe is capable of measuring AFM images. In addition, we have developed the anodic bonding of diamond thin film to glass using Al or Ti film as an intermediate layer for assembly. This bonding technique will allow diamond microstructures to be used in many novel applications for microelectromechanical systems. [397]Index Terms-Diamond AFM probe, diamond film, diamond microstructures, MEMS, micromachining.

show abstract

Boron-doped vapor-deposited diamond temperature microsensors

Cited by 35 publications

References 26 publications

Growth and application of undoped and doped diamond films

Growth and application of undoped and doped diamond films

Poly-diamond gated field-emitter display cells

Micromachining of diamond film for MEMS applications

Contact Info

Product

Resources

About