Catalytic etching of {100}-oriented diamond coating with Fe, Co, Ni, and Pt nanoparticles under hydrogen

Abstract

Etching of a highly {100}-oriented diamond coating, {100}HODC, with hydrogen gas using Fe, Co, Ni, and Pt nanoparticles as a catalyst was examined at high temperatures over 700°C by high-resolution scanning electron microscopy and Raman spectroscopy. The metal atoms vacuum-evaporated onto the {100}HODC formed nanoparticles themselves when heated at high temperatures; e.g. 700°C, in a flowing gas mixture of H 2 (10%) + N 2 (90%). At 800°C, short nano-channels and etch pits holding metal nanoparticles were formed by Fe, Co, and Ni. The shapes of the Co and Ni nanoparticles in the etch pits were affected by the shape of the etch pits; reversed pyramidal shape. On the other hand, the top view of the Fe nanoparticles embedded in the etch pits showed a distorted round shape, probably due to the formation of something such as iron carbide, while the carbon content was unknown. Apparently, etching of the {100}HODC by Pt nanoparticles was observed after the treatment at 1000°C. The difference in the catalytic etching behavior among these metal particles, the potential etching mechanism of diamonds with hydrogen by metal nanoparticles, probably as melted metal nanoparticles, and the formation mechanism of vacant etch pits were discussed.2

Polishing, preparation and patterning of diamond for device applications

“…Once on the surface of the diamond, enhanced etching will occur at the location of the metal nanoparticle in certain crystallographic directions. [52][53][54] Metal nanoparticles do not appear as the best solution for diamond substrate surface treatments, however they can be applied in other processes to reduce or exploit dislocation propagation at the substrate-epitaxial layer interface or produce features with specific crystalline surfaces. achieved an etch pit density eight times lower after three CVD growths when compared to a reference sample.…”

Atomically flat diamond (100) surface formation by anisotropic etching of solid-solution reaction of carbon into nickel

“…Additionally, a catalytic etching of diamond by Ni nanoparticles and films at temperatures of around 900°C under a hydrogen atmosphere has been reported [18][19][20][21][22]. However, the morphology of the selective etched diamond surfaces has not been investigated in detail.…”

Fabrication of n‐Type Doped V‐Shaped Structures on (100) Diamond

“…Metals satisfying this requirement include nickel (Ni), cobalt (Co), and platinum (Pt), of which Ni and Pt have the highest and lowest carbon solubilities, respectively. [19] Recently, Temahuki et al [20] demonstrated the fabrication of such microstructures by catalytic etching with Ni nanoparticles. The subsequent overgrowth of those structures using highly phosphorus-doped diamond notably improved the Ohmic contact properties to the n-type doped diamond on a (100) substrate.…”