Irradiation with 6 MeV electrons of near-UV (peak wavelength 385-390 nm) multi-quantum-well (MQW) GaN/InGaN light emitting diodes (LEDs) causes an increase in density of deep electron traps near E c À0.8 and E c À1 eV, and correlates to a 90% decrease of electroluminescence (EL) efficiency after a fluence of 1.1 Â 10 16 cm À2 . The likely origin of the EL efficiency decrease is this increase in concentration of the E c À0.8 eV and E c À1 eV traps.