“…[12][13][14][15][16] Moreover, MgO thin lms can be used for the protection of plasma display panels from erosion by ion bombardment. 17 Several deposition methodologies for MgO and ZnO layer formation exist, including the sol-gel process in combination with spin-coating, 18,19 spray pyrolysis, 20,21 pulsed laser deposition, 22,23 molecular beam epitaxy, 24 as well as metal-organic gas phase deposition techniques such as CVD (¼ chemical vapor deposition) [25][26][27] and ALD (¼ atomic layer deposition). 28,29 Among them, CVD and spin-coating provide convincing alternatives owing to their simplicity of processing control, covering of large areas and their capability to allow adherent and reproduceable lms at low cost.…”