Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. 2003
DOI: 10.1109/dtip.2003.1287006
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Design process supporting simulations on wafer level packages

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Cited by 3 publications
(5 citation statements)
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“…First, a generalised plane-strain model in a parallel cross section was created for a diminished computational effort. The results have already been reported (Sommer et al 2003). It could be shown that the computed maximum stresses remain lower than the ultimate strength values for the corresponding materials and the interfaces between them at each step This is in agreement with the manufacturer's experience.…”
Section: Fe-sequential Build-upsupporting
confidence: 91%
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“…First, a generalised plane-strain model in a parallel cross section was created for a diminished computational effort. The results have already been reported (Sommer et al 2003). It could be shown that the computed maximum stresses remain lower than the ultimate strength values for the corresponding materials and the interfaces between them at each step This is in agreement with the manufacturer's experience.…”
Section: Fe-sequential Build-upsupporting
confidence: 91%
“…As shown in the study (Sommer et al 2003) on sequential build-up, large straining of the copper occurs at the micro-via corner. During lifetime it may be expected that thermal strains of the polymer layers lead to fatigue of the copper layer.…”
Section: Parametric Thermo-mechanical Studymentioning
confidence: 92%
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