Development of a silicon-based yttria-stabilized-zirconia (YSZ), amperometric oxygen sensor

Yu, Shubin; Wu, Qiong; Tabib-Azar, Massood; Liu, Chung Chiun

doi:10.1016/s0925-4005(02)00110-7

Cited by 37 publications

(10 citation statements)

References 8 publications

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“…Ion conduction in dimensionally reduced systems such as thin films has become a highly active research area with applications, for example, in sensors [1] or micro solid oxide fuel cells (SOFC) [2] . Numerous studies have been performed on yttria stabilized zirconia (YSZ) [3] , [4] , [5] , [6] , [7] , [8] , [9] , [10] , gadolinium doped ceria (GDC) [3] , [11] , [12] , [13] , [14] and other oxides.…”

Section: Introductionmentioning

confidence: 99%

Measurement of the across-plane conductivity of YSZ thin films on silicon

et al. 2012

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Across-plane conductivity measurements on ion conducting thin films of a few ten nanometers thickness are challenging due to frequently occurring short-circuits through pinholes in the layer. In this contribution, a method is proposed which allowed across-plane conductivity measurements on yttria stabilized zirconia (YSZ) layers with thicknesses as low as 20 nm. YSZ layers were prepared onto silicon substrates with a thin native silica interlayer and the across-plane conductivity was measured on circular microelectrodes by impedance spectroscopy. The silica interlayer exhibits strongly blocking behavior, which helps to avoid short-circuits through pinholes. Different relaxation frequencies of YSZ and silica make separation of these layers possible. An equivalent circuit is suggested, which allows extraction of YSZ properties, and its validity is proven by varying microelectrodes size and layer thickness. All parameters yield the expected behavior.

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Section: Introductionmentioning

confidence: 99%

Measurement of the across-plane conductivity of YSZ thin films on silicon

et al. 2012

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“…As well-known structured ceramic materials, rare earth stabilized zirconias (RESZ) have been receiving intensive attention recently for their applications in solid oxide fuel cells (SOFCs), 1,2 oxygen sensors, 3 transformation toughened ceramics, 4 catalysis 5 and optics 6,7 . For many of these applications, fine crystalline zirconia particles with high surface area are strongly required so as to obtain the desirable properties.…”

Section: Introductionmentioning

confidence: 99%

Doping and grain size effects in nanocrystalline ZrO₂–Sc₂O₃system with complex phase transitions: XRD and Raman studies

Zhang

Liao

et al. 2004

Phys. Chem. Chem. Phys.

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“…Intensive study has been carried out on nanostructured yttriastabilized zirconia (YSZ) thin films in recent years with two main goals: (1) studying space-charge effects 1 on the electrical conduction when one of the sample dimensions is comparable to the Debye length; and (2) evaluating suitability as the electrolyte material for intermediate (650−800 °C) or low temperature (≤650 °C) micro solid oxide fuel cells (SOFCs) 2,3 or sensors. 4 Ionic conductivity is the primary measure of performance for an ionic conductor. However, the reported ion conductivity data of YSZ films with nanometer thickness are inconclusive.…”

Section: ■ Introductionmentioning

confidence: 99%

High-Throughput Measurement of Ionic Conductivity in Composition-Spread Thin Films

et al. 2013

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This paper demonstrates the feasibility of high-throughput investigation of ionic conductivity in oxygen-ion conductors. Yttria stabilized zirconia (YSZ) composition-spread thin films with nanometer-size grains were prepared by 90° off-axis reactive RF cosputtering. We compare results for two electrode configurations, namely, out-of-plane (parallel plate) and in-plane (planar interdigitated electrode) and find that the contribution from the intragrain conductivity in YSZ thin films (150 nm) is more explicit in the latter configuration because it greatly diminishes electrode effects. The intragrain oxygen ion conductivity of thin film YSZ was systematically measured as a function of yttria concentration over the range 2 mol % to 12 mol %. The results show that the measured conductivity of the YSZ thin films is close to that of corresponding bulk materials with a peak value around 3 × 10⁻⁴ S cm⁻¹ at 440 °C at the optimum Y₂O₃ concentration of 8 mol %. Validation of this technique means that it can be applied to novel chemical systems for which systematic bulk measurements have not been attempted.

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Development of a silicon-based yttria-stabilized-zirconia (YSZ), amperometric oxygen sensor

Cited by 37 publications

References 8 publications

Measurement of the across-plane conductivity of YSZ thin films on silicon

Measurement of the across-plane conductivity of YSZ thin films on silicon

Doping and grain size effects in nanocrystalline ZrO₂–Sc₂O₃system with complex phase transitions: XRD and Raman studies

High-Throughput Measurement of Ionic Conductivity in Composition-Spread Thin Films

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Development of a silicon-based yttria-stabilized-zirconia (YSZ), amperometric oxygen sensor

Cited by 37 publications

References 8 publications

Measurement of the across-plane conductivity of YSZ thin films on silicon

Measurement of the across-plane conductivity of YSZ thin films on silicon

Doping and grain size effects in nanocrystalline ZrO2–Sc2O3system with complex phase transitions: XRD and Raman studies

High-Throughput Measurement of Ionic Conductivity in Composition-Spread Thin Films

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Doping and grain size effects in nanocrystalline ZrO₂–Sc₂O₃system with complex phase transitions: XRD and Raman studies