Effect of ultrahigh nucleation density on diamond growth at different growth rates and temperatures

Yang, G. S.; Aslam, M.; Kuo, Kuan-Chu; Reinhard, D.K.; Asmussen, J.

doi:10.1116/1.587898

Cited by 28 publications

(4 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…038 mm) in a fluid on Si substrate) was used to study the effect of nucleation density on the film quality, surface roughness and growth rate. 125 Samples pretreated and processed under similar conditions to minimise the effect of different deposition conditions on film morphology showed similar surface texture and morphology. Samples with the highest primary nucleation density had the smoothest film surfaces at all deposition conditions.…”

Section: Growth Of Diamondmentioning

confidence: 94%

A review of nucleation, growth and low temperature synthesis of diamond thin films

Das¹,

Singh²

2007

International Materials Reviews

149

View full text Add to dashboard Cite

Diamond thin films have outstanding optical, electrical, mechanical and thermal properties, which make these attractive for applications in a variety of current and future systems. In particular, the wide band gap, optical transparency and unusually high thermal conductivity of diamond thin films make them an ideal semiconductor for applications in current and future electronics. However, synthesis of diamond thin films with adequate quality remains a challenging task. Synthesis of diamond at low temperatures is even more challenging because of the difficulties in the nucleation and growth steps involved in diamond thin film deposition on a variety of substrates. Among the several deposition techniques for synthesising diamond films, plasma enhanced chemical vapour deposition is the most promising technique because of its potential for low temperature synthesis. Consequently, the first part of this paper reviews the current state of the nucleation and growth of diamond during chemical vapour deposition. A uniform and high nucleation density is a prerequisite for getting a good quality diamond film with significant growth rate. Also, since the process conditions for nucleation and growth steps are different, attempts are made in this review to identify the important parameters responsible for enhancing the nucleation and growth rates of diamond film. Describing the indispensable need for low temperature growth of diamond film, the second part of the paper reviews the research on the growth of diamond thin films at low temperatures. In spite of the slower kinetics at lower deposition temperatures, an attempt is made to identify the key processing conditions, which enhance the low temperature growth process. In addition, the mechanisms of diamond nucleation and growth are discussed based on the observations from in situ characterisation techniques such as Fourier transform infrared reflection absorption spectroscopy, real time spectroscopic ellipsometry and molecular beam mass spectroscopy.

show abstract

Section: Growth Of Diamondmentioning

confidence: 94%

A review of nucleation, growth and low temperature synthesis of diamond thin films

Das¹,

Singh²

2007

International Materials Reviews

149

View full text Add to dashboard Cite

show abstract

“…Both scratched and seeded samples were used for comparison. One experiment was conducted using source gases at flow rates of 1.5 sccm CH 4 relatively low, yielding a discontinuous film with large grains of approximately 1 µm size after 8 h of deposition. The codeposited seeded substrate shows a fine-grained morphology with an average grain size of less than 1 µm.…”

Section: Resultsmentioning

confidence: 99%

“…2,3 Another growth preparation process that is frequently used is deliberate seeding of the substrate surface with diamond particles, which in effect negates the issue of nucleation rate by providing a predetermined areal nucleation density. 4,5 Diamond seeding has the advantage of being insensitive to deposition conditions, with growth of the nuclei beginning "immediately" upon introduction to the growth environment. Scratched substrates require an "incubation" period preceding growth that is dependent on the growth environment (substrate temperature, gas pressure, and gas composition).…”

Section: Introductionmentioning

confidence: 99%

Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

Gilbert

Carasso

Demkowicz

et al. 1997

Journal of Elec Materi

View full text Add to dashboard Cite

Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at low pressures (1.000 and 1.500 Torr) in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. Scanning electron microscopy and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density and gas-phase composition.

show abstract

“…Monocrystalline diamond substrates induce homoepitaxial crystalline films, whereas non-diamond and PCD substrates result in the growth of PCD films. For non-diamond substrates, a nucleation procedure is necessary to produce the diamond precursors, namely: (1) surface abrasion with diamond particles to insert them on the substrate's surface [72][73][74], (2) sonication of diamond powder loaded solution [75], (3) bias enhanced nucleation (BEN) [76][77][78],where C = ions and CHx = (x = 1, 2, 3) from a plasma, created in front of the substrate surface, are accelerated, with very low energy, towards the surface, getting implanted on the surface and inducing the seeding process, (4) spinning of diamond-powder-loaded photoresist (DPR) [79], and (5) spraying of diamond-loaded fluids [80,81] on the substrate surface. All substrate's surfaces seeding processes, described above, are applied to grown diamond films by different methods, as summarized in Table 6 [82].…”

Section: Chemical Vapor Deposition Of Pcd Filmsmentioning

confidence: 99%

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Auciello

Aslam

2021

J Mater Sci

View full text Add to dashboard Cite

A comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

show abstract

Effect of ultrahigh nucleation density on diamond growth at different growth rates and temperatures

Abstract: Growth rate and quality variation of homoepitaxial diamond grown at elevated temperatures

Cited by 28 publications

References 15 publications

A review of nucleation, growth and low temperature synthesis of diamond thin films

A review of nucleation, growth and low temperature synthesis of diamond thin films

Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Contact Info

Product

Resources

About