1999
DOI: 10.1016/s0167-9317(99)00038-6
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Fabrication and characterisation of Coulomb blockade devices in silicon

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Cited by 14 publications
(5 citation statements)
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“…At low backgate voltages random fluctuations of the dopant concentration lead to the formation of a multiple-tunneljunction device. The number of effective tunnel barriers within the double-dot geometry can be tuned by changing the electrostatic potentials of the gates and thereby shifting the Fermi level relative to the potential landscape [10]. Multiple tunnel junctions in series cause the maximum width of the CBR to depend on the number of junctions [10] and the distribution of conductance oscillations is, as expected, stochastic [11,12].…”
mentioning
confidence: 84%
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“…At low backgate voltages random fluctuations of the dopant concentration lead to the formation of a multiple-tunneljunction device. The number of effective tunnel barriers within the double-dot geometry can be tuned by changing the electrostatic potentials of the gates and thereby shifting the Fermi level relative to the potential landscape [10]. Multiple tunnel junctions in series cause the maximum width of the CBR to depend on the number of junctions [10] and the distribution of conductance oscillations is, as expected, stochastic [11,12].…”
mentioning
confidence: 84%
“…The number of effective tunnel barriers within the double-dot geometry can be tuned by changing the electrostatic potentials of the gates and thereby shifting the Fermi level relative to the potential landscape [10]. Multiple tunnel junctions in series cause the maximum width of the CBR to depend on the number of junctions [10] and the distribution of conductance oscillations is, as expected, stochastic [11,12]. Increasing V bg leads to an increase of the Fermi energy and to a significant decrease in the number of effective tunnel junctions.…”
mentioning
confidence: 99%
“…For example, nanowire MOSFETs fabricated by conventional VLSI fabrication technologies can work as SE devices, although multidots were created naturally in the channel so that the number and size of dots cannot be controlled. [1][2][3][4][5][6] Another fabrication method, where nanoparticles, such as colloidal or gold nanoparticles, were deposited on the substrate with the electrodes, was reported. [7][8][9][10][11] Double-dot SE devices with a common gate can work only as SE transistors where electrons are continuously transferred one by one.…”
Section: Introductionmentioning
confidence: 99%
“…Silicon [or silicon-on insulator (SOI)] is, in principle, an attractive material for QD experiments due to its highly developed fabrication technology and the potential integration of QD devices with conventional electronics circuits. , Previous approaches toward building QD systems on SOI substrates have mainly focused on obtaining ultrathin NWs from lithography followed by etching procedures to reduce the NW width. Single-electron effects have been observed in these devices, but the results disagree with the designed device geometry; the etching processes introduce defects and roughness that, in turn, lead to the random formation of QDs within the nanostructure and irreproducible transport characteristics. For example, Coulomb blockade diamond diagrams, a signature of single-electron charging, are typically not obtainable because the change of signal in consecutive scans can be much larger than the gate influence .…”
Section: Introduction and Experimental Backgroundmentioning
confidence: 99%