Germanium hut nanostressors on freestanding thin silicon membranes

Evans, Paul G.; Tinberg, D. S.; Roberts, Michelle; Lagally, M. G.; Xiao, Yanan; Lai, Barry; Cai, Zhonghou

doi:10.1063/1.2031941

Cited by 18 publications

(16 citation statements)

References 18 publications

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“…Compared with the bulk counterpart, XOI system exhibits less parasitic capacitance and lower power consumption, which makes it an excellent platform for high‐performance electronic devices . The compound nanomembranes can be semiconductors such as silicon and germanium, or insulators such as nanocrystalline diamond and vanadium dioxide (VO 2 ) . Other materials could be further deposited on the topmost nanomembranes to achieve more properties.…”

Section: Release Methodsmentioning

confidence: 99%

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Huang

et al. 2018

Adv Materials Technologies

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chemical vapor deposition (CVD). When it comes to on-chip integrations, these strategies are limited by accessible materials and slow processing rate, [31] and the generated defects in the produced amorphous materials placed restrictions to its further applications in high-performance devices. [32] Therefore, novel approaches and methods of fabricating 3D micro/ nanostructures are highly demanded.Rolled-up nanotechnology is an alternative technique that fabricates 3D nanostructures out of planar films called nanomembranes. Nanomembranes are defined as planar thin films with thicknesses between one to a few hundred nanometers. [33] These nanomembrane materials behave like soft materials while maintaining excellent properties like their bulk counterpart and therefore is an ideal platform for fabricating 3D nanostructures. Inspired by concepts of origami and kirigami, [34][35][36][37] researchers folded and rolled these nanomembranes into a number of fascinating 3D structures. [17,[38][39][40][41][42][43][44] Several review articles have been published with emphasis on nanomembranes thinning and manufacture, mechanical deformation, fundamental studies, and their practical applications. [33,41,[45][46][47] By releasing strain-engineered planar functional nanomembranes on sacrificial layers, complex rolled-up structures including tubes, [48][49][50][51][52][53][54] rings, [54][55][56] and helices [42,[57][58][59] can be constructed (for instance, see Figure 1f). This approach can be applied to engineer a wide range of organic and inorganic materials and their combinations, including metals, insulators, traditional semiconductor families, and recently emerged 2D materials. Given its compatibility to standard CMOS fabrication process and ability to manufacture large periodic arrays with precise geometric control, rolled-up nanotechnology further expands the applications of 3D nanostructures to a number of areas, including optical resonators, [60,61] photodetectors, [62,63] micromotors, [64][65][66] energy storage, [67] drug delivery, [68] gas detection, [53] and environmental decontamination. [69] The versatility in the materials design and geometric tuning in rolled-up nanotechnology presents tremendous opportunities for further developing sophisticated 3D fine structures.In this review, we focus on the materials perspective and fabrication process of rolled-up nanotechnology. First, we give a brief introduction of rolled-up mechanism, as well as its fabrication techniques and control strategies. We summarize and highlight recent advances of different materials systems and their corresponding rolling methodologies. Second, Rolled-up nanotechnology is an appealing technique that tunes planar films into complex 3D fine structures. The rolling-up mechanism and methodology of a huge variety of materials and their combinations are summarized, including metals, insulators, traditional semiconductor families, polymers, and recently emerged 2D materials. The basic principles of strain induction, fabrication methods, and techni...

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Section: Release Methodsmentioning

confidence: 99%

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Huang

et al. 2018

Adv Materials Technologies

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“…The x-ray reflectivity curves were interpreted using a model consisting of the top STO layer, a BTO layer, and the STO substrate. The density of crystalline STO substrate was fixed at 5.1 g/cm 3 . The densities of amorphous STO and BTO were determined from the analysis of curve (ii), with values of 4.2 g/cm 3 and 4.5 g/cm 3 , respectively.…”

Section: A In Situ X-ray Reflectivitymentioning

confidence: 99%

“…The density of crystalline STO substrate was fixed at 5.1 g/cm 3 . The densities of amorphous STO and BTO were determined from the analysis of curve (ii), with values of 4.2 g/cm 3 and 4.5 g/cm 3 , respectively. The thicknesses obtained from the fits were, for curve (ii) a BTO thickness of 2.4 nm and an STO thickness of 0.6 nm and, for curve (iii), an additional 9.5 nm of STO.…”

Section: A In Situ X-ray Reflectivitymentioning

confidence: 99%

“…In materials systems ranging from semiconductors to complex oxides, these processes result in the development of structural features with nanoscale to sub-μm dimensions, including dislocations associated with plastic relaxation and the formation of quantum dots and other surface nanostructures. [1][2][3] The ionic valence and phase in epitaxial metal oxides similarly depend on the composition of the gas environment during growth and crystallization. 4 The development of microstructural and chemical features can be probed with focused hard x-ray beams using scanning diffraction microscopy, ptychography, and coherent diffraction imaging.…”

Section: Introductionmentioning

confidence: 99%

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Instrument for in situ hard x-ray nanobeam characterization during epitaxial crystallization and materials transformations

Marks

Quan

Liu

et al. 2021

Review of Scientific Instruments

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Solid-phase epitaxy (SPE) and other three-dimensional epitaxial crystallization processes pose challenging structural and chemical characterization problems. The concentration of defects, the spatial distribution of elastic strain, and the chemical state of ions each vary with nanoscale characteristic length scales and depend sensitively on the gas environment and elastic boundary conditions during growth. The lateral or three-dimensional propagation of crystalline interfaces in SPE has nanoscale or submicron characteristic distances during typical crystallization times. An in situ synchrotron hard x-ray instrument allows these features to be studied during deposition and crystallization using diffraction, resonant scattering, nanobeam and coherent diffraction imaging, and reflectivity. The instrument incorporates a compact deposition system allowing the use of short-working-distance x-ray focusing optics. Layers are deposited 2 using radio-frequency magnetron sputtering and evaporation sources. The deposition system provides control of the gas atmosphere and sample temperature. The sample is positioned using a stable mechanical design to minimize vibration and drift and employs precise translation stages to enable nanobeam experiments. Results of in situ x-ray characterization of the amorphous thin film deposition process for a SrTiO3/BaTiO3 multilayer illustrate implementation of this instrument.

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“…The anisotropy in the strain/stress also remarkably influences the geometries of the structures because the nanomembranes prefer to bend/roll along the compliant direction due to the elastic energy minimization. For instance, the <100> directions in single crystal Si are the most compliant with the smallest Young's modulus, and the rolling along this direction is energetically favorable 47, 229. Therefore, if the nanomembrane is released (for example, by chemical under etching) along the most compliant direction, micro‐/nanotubes will be formed 26.…”

Section: Self‐rolled Nanomembranesmentioning

confidence: 99%

Cyclization of Synthetic seco‐Proansamitocins to Ansamitocin Macrolactams by Actinosynnema pretiosum as Biocatalyst

et al. 2010

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Conventional solid films on certain substrates play a crucial role in various applications, for example in flat panel displays, silicon technology, and protective coatings. Recently, tremendous attention has been directed toward the thinning and shaping of solids into so‐called nanomembranes, offering a unique and fantastic platform for research in nanoscience and nanotechnology. In this Review, a conceptual description of nanomembranes is introduced and a series of examples demonstrate their great potential for future applications. The thinning of nanomembranes indeed offers another strategy to fabricate nanomaterials, which can be integrated onto a chip and exhibit valuable properties (e.g. giant persistent photoconductivity and thermoelectric property). Furthermore, the stretching of nanomembranes enables a macroscale route for tuning the physical properties of the membranes at the nanoscale. The process by which nanomembranes release from a substrate presents several approaches to shaping nanomembranes into three‐dimensional architectures, such as rolled‐up tubes, wrinkles, and the resulting channels, which can provide fascinating applications in electronics, mechanics, fluidics, and photonics. Nanomembranes as a new type of nanomaterial promise to be an attractive direction for nanoresearch.

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Germanium hut nanostressors on freestanding thin silicon membranes

Cited by 18 publications

References 18 publications

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Instrument for in situ hard x-ray nanobeam characterization during epitaxial crystallization and materials transformations

Cyclization of Synthetic seco‐Proansamitocins to Ansamitocin Macrolactams by Actinosynnema pretiosum as Biocatalyst

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