“…Gallium arsenide (GaAs) is an important compound semiconductor that has many applications including light-emitting diodes, microwave devices, broadband communications, and space solar cells (Fu, Li, & Hicks, 2000). The GaAs thin films can be deposited by either molecular-beam epitaxy (MBE) (e.g., Vanhove, Lent, Pukite, & Cohen, 1983) or metal-organic chemical vapor deposition (MOCVD) (e.g., Tirtowidjojo & Pollard, 1988;Law, Li, Begarney, & Hicks, 2000).…”