2005
DOI: 10.1093/ietele/e88-c.4.608
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Improvement in Retention/Program Time Ratio of Direct Tunneling Memory (DTM) for Low Power SoC Applications

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“…The way to make the time as short as 0.1 ns is to reduce T ox to 0.5 nm. According to an extrapolation from the experimental data of electron tunneling injection/ejection, 12 the time becomes as short as 0.1 ns when T ox is reduced to 0.5 nm. Though it looks very difficult to realize such a thin T ox , it will be possible utilizing techniques such an atomic layer deposition ͑ALD͒.…”
mentioning
confidence: 99%
“…The way to make the time as short as 0.1 ns is to reduce T ox to 0.5 nm. According to an extrapolation from the experimental data of electron tunneling injection/ejection, 12 the time becomes as short as 0.1 ns when T ox is reduced to 0.5 nm. Though it looks very difficult to realize such a thin T ox , it will be possible utilizing techniques such an atomic layer deposition ͑ALD͒.…”
mentioning
confidence: 99%