2013
DOI: 10.1109/jdt.2013.2270276
|View full text |Cite
|
Sign up to set email alerts
|

Investigation and Comparison of the GaN-Based Light-Emitting Diodes Grown on High Aspect Ratio Nano-Cone and General Micro-Cone Patterned Sapphire Substrate

Abstract: In this paper, we demonstrated the high performance GaN-based LEDs by using a high aspect ratio cone-shape nano-patterned sapphire substrate (HAR-NPSS). We utilized nano-imprint lithography (NIL) and dry-etching system to fabricate a high depth HAR-NPSS. The micro-scale patterned sapphire substrate (PSS) was also used for comparison. A great enhancement of light output was observed when GaN-based LEDs were grown on a HAR-NPSS or a PSS. The light output power of LEDs with a HAR-NPSS and LEDs with a PSS were enh… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2014
2014
2023
2023

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 17 publications
(2 citation statements)
references
References 26 publications
0
2
0
Order By: Relevance
“…Kuo's study also showed the same tendency in reducing the dislocation density of GaN grown on NPSS with a reduction of 27% as compared with GaN grown on MPSS. [18] Nonetheless, some simulated results indicated that the LEE enhancement might be decreased with the period of the patterns decreased. [19] It means there is probable some loss in LEE while the NPSS is adopted, although the performance of NPSS-LED is sometimes better than that of MPSS-LED.…”
Section: Introductionmentioning
confidence: 99%
“…Kuo's study also showed the same tendency in reducing the dislocation density of GaN grown on NPSS with a reduction of 27% as compared with GaN grown on MPSS. [18] Nonetheless, some simulated results indicated that the LEE enhancement might be decreased with the period of the patterns decreased. [19] It means there is probable some loss in LEE while the NPSS is adopted, although the performance of NPSS-LED is sometimes better than that of MPSS-LED.…”
Section: Introductionmentioning
confidence: 99%
“…Recent theoretical and experimental studies 7,8 have suggested that greater light output power (LOP) may be achieved for GaN-based LEDs when nanopatterned sapphire substrates (NPSSs) are used rather than micropatterned sapphire substrates (MPSSs). Recent theoretical and experimental studies 7,8 have suggested that greater light output power (LOP) may be achieved for GaN-based LEDs when nanopatterned sapphire substrates (NPSSs) are used rather than micropatterned sapphire substrates (MPSSs).…”
Section: Introductionmentioning
confidence: 99%