HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de Abstract--GaN-based materials are expected to show excellent immunity against short-channel effects because they have relatively lower permittivity and higher electron effective mass, compared to other materials such as Si, Ge, and In(Ga)As. To further reduce the short-channel effects, it is important to enhance the gate controllability of the device by utilizing a gateall-around structure. In this work, GaN vertical GAA nanowire MOSFETs with various diameters of 120, 75, and 45 nm have been fabricated. The device with a diameter of 120 nm shows threshold voltage of 0.7 V, drain saturation voltage of 0.5 V, and subthreshold swing of 70 mV/decade, which would be suitable for low voltage/power applications. However, the devices with smaller diameter of 75 and 45 nm show peculiar characteristics, such as a second rise of the drain current in output characteristics and a negative transconductance. Systematical analyses with dc and noise measurements as well as TCAD simulations show that the observed characteristics are due to the contact potential which strongly depends on the nanowire diameter and the trapping effect into deep traps at the sidewall surface of the nanowire channel. Index Terms--GaN vertical nanowire MOSFET, low voltage application, nanowire diameter, contact potential, negative transconductance I. INTRODUCTION -V semiconductors such as GaAs and InAs offer superior material and electrical properties and are considered to replace the channel layers in the conventional Si-based devices which technologies have been quiet close to their limitations [1-6]. In contrast with other III-V