Magnetron-sputtered carbon nitride (CNx) films

Kola, P.V.; Cameron, D.C.; Meenan, Brian J.; Pischow, K.A.; Anderson, C. A.; Brown, N.M.D.; Hashmi, M.S.J.

doi:10.1016/0257-8972(95)08336-7

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Cited by 27 publications

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“…So far several methods are reported to yield C 3 N 4 coatings, amongst them, laser ablation [6], RF sputtering [7], CVD [8], reactive DC/RF magnetron sputtering [9,10], and Arc plasma deposition [11] are noteworthy. Though many techniques have been used to fabricate C -N film, yet the crystalline carbon nitride film has been reported by few research group only.…”

Section: Introductionmentioning

confidence: 99%