Modeling and simulation of a flat spring for use in an electromagnetic microgenerator

Awaja, Nibras; Sood, D.K.; Vinay, Thurai

doi:10.1117/12.582047

Cited by 12 publications

(10 citation statements)

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“…(2) Flexural beam can increase the length of the beam so that the magnet can get more deflection (Awaja et al 2005); (3) Compared to a diaphragm or a membrane (Shearwood and Yates 1997), planar spring with gaps between the beams can greatly decrease the air damping produced in the vibration of the magnet; (4) Circular angle at the corner of the beam can disperse the stress compared to right angle at the same place.…”

Section: Electromagnetic Vibration Energy Harvester's Designmentioning

confidence: 99%

“…NdFeB permanent magnet is selected due to its very high magnetic energy product. An electroplated copper spring other than silicon spring (Kulkarni et al 2007;Pan et al 2006;Awaja et al 2005) is used as the resonant structure in our device. The main advantages of copper spring are in the following: (1) Young's modulus of copper is smaller than that of silicon.…”

Section: Electromagnetic Vibration Energy Harvester's Designmentioning

confidence: 99%

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A micro electromagnetic low level vibration energy harvester based on MEMS technology

et al. 2009

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This paper presents a micro electromagnetic energy harvester which can convert low level vibration energy to electrical power. It mainly consists of an electroplated copper planar spring, a permanent magnet and a copper planar coil with high aspect ratio. Mechanical simulation shows that the natural frequency of the magnetspring system is 94.5 Hz. The resonant vibration amplitude of the magnet is 259.1 lm when the input vibration amplitude is 14 lm and the magnet-spring system is at resonance. Electromagnetic simulation shows that the linewidth and the turns of the coil influence the induced voltage greatly. The optimized electromagnetic vibration energy harvester can generate 0.7 lW of maximal output power with peak-peak voltage of 42.6 mV in an input vibration frequency of 94.5 Hz and input acceleration of 4.94 m/s 2 (this vibration is a kind of low level ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. The testing results show that the prototype can generate induced voltage (peak-peak) of 18 mV and output power of 0.61 lW for 14.9 m/s 2 external acceleration at its resonant frequency of 55 Hz (this vibration is not in a low ambient vibration level).

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Section: Electromagnetic Vibration Energy Harvester's Designmentioning

confidence: 99%

Section: Electromagnetic Vibration Energy Harvester's Designmentioning

confidence: 99%

A micro electromagnetic low level vibration energy harvester based on MEMS technology

et al. 2009

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“…On the other hand, MEMS microsprings have more structural shapes and application patterns compared with traditional springs. Now there are no special summaries for the application patterns of MEMS microsprings, which is very inconvenient for the design and fabrication of planar microsprings (Brenner et al 2000;Awaja and Sood 2005;Li and Uttamchandani 2002).…”

Section: Introductionmentioning

confidence: 99%

Analysis of application patterns of Z-type MEMS microspring

Shi

2009

Microsyst Technol

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In this paper, we design a Z-type microspring, which consists of several ''Z'' type micromechanical beams within mutual connection. With good mechanical performance and mature LIGA fabrication technology, Ni is chosen as the material of Z-type MEMS microspring. The mechanical properties of electroformed Ni have been tested by the Micro Hardness Tester, and the Young's modulus is 219 GPa. Different from traditional springs, microsprings can be divided into three application patterns in direction x, y, and z to study. Applying the Castigliano second theorem of energy method in macro theory, the formulas used to calculate the spring constant of Z-type microspring in the directions of the three application patterns were derived, and verified by the ANSYS finite element method. Using the Tytron250 micro force test machine, the experiments of the Z-type microspring deformation properties were carried out. The spring constant, rupture force and rupture strength of Z-type microspring in direction y are 3821 N/m, 1.64 N and 1.61 GPa, respectively. The experimental results agree with the theoretical analysis. Based on the analysis above, the change laws of the spring constant of microspring in the three application patterns are summarized.

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“…The silicon has much higher yield strength than gallium arsenide (GaAs), copper (Cu), and polymeric material such as Parylene C, PDMS, and SU-8. Moreover, it has many advantages such as low mechanical loss, low material cost, and processing compatibility with CMOS rectifying circuitry [13]. Also, the bulk micromachined silicon spring has merits in terms of mass production and cost reduction through batch fabrication.…”

Section: Design Of Proposed Electromagnetic Energy Harvestersmentioning

confidence: 99%

“…It generated 0.3μW of output power at the resonant frequency of 4MHz and the optimal load resistance of 39Ω [6][7]. Recently, several electromagnetic energy harvesters were reported using cantilever structures and mass-spring-damper systems [8][9][10][11][12][13][14][15][16][17]. These devices were comprised of single steel beam, coils, and magnets which were attached to the end of the beam.…”

Section: Introductionmentioning

confidence: 99%

Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications

Bang¹,

Park²

2013

Journal of Electrical Engineering and Technology

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-In this paper, two different electromagnetic energy harvesters using bulk micromachined silicon spiral springs and Polydimethylsiloxane (PDMS) packaging technique have been fabricated, characterized, and compared to generate electrical energy from ultra-low ambient vibrations under 0.3g. The proposed energy harvesters were comprised of a highly miniaturized Neodymium Iron Boron (NdFeB) magnet, silicon spiral spring, multi-turned copper coil, and PDMS housing in order to improve the electrical output powers and reduce their sizes/volumes. When an external vibration moves directly the magnet mounted as a seismic mass at the center of the spiral spring, the mechanical energy of the moving mass is transformed to electrical energy through the 183 turns of solenoid copper coils. The silicon spiral springs were applied to generate high electrical output power by maximizing the deflection of the movable mass at the low level vibrations. The fabricated energy harvesters using these two different spiral springs exhibited the resonant frequencies of 36Hz and 63Hz and the optimal load resistances of 99Ω and 55Ω, respectively. In particular, the energy harvester using the spiral spring with two links exhibited much better linearity characteristics than the one with four links. It generated 29.02μW of output power and 107.3mV of load voltage at the vibration acceleration of 0.3g. It also exhibited power density and normalized power density of 48.37μW·cm-3 and 537.41μW·cm-3·g-2, respectively. The total volume of the fabricated energy harvesters was 1cm x 1cm x 0.6cm (height).

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Modeling and simulation of a flat spring for use in an electromagnetic microgenerator

Cited by 12 publications

References 0 publications

A micro electromagnetic low level vibration energy harvester based on MEMS technology

A micro electromagnetic low level vibration energy harvester based on MEMS technology

Analysis of application patterns of Z-type MEMS microspring

Bulk Micromachined Vibration Driven Electromagnetic Energy Harvesters for Self-sustainable Wireless Sensor Node Applications

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