“…Formally, the azide group can be regarded as a pseudo halogenide, so M(N 3 ) 3 resemble the trichlorides MCl 3 , which are volatile compounds and are successfully used as sources for HVPE (hydride vapor phase epitaxy) of the nitrides [118]. However, the compounds M(N 3 ) 3 are extremely dangerous, energetic, and explosive materials (temperature and shock sensitive), as well as being non-volatile solids [119]. In 1989 Beach et al [120] and Gladfelter et al [121] [122,123], Kouvetakis et al [124][125][126] and ourselves [127][128][129][130][131][132][133][134][135] who have independently start to study the coordination chemistry of group 13 azides in more detail, with the aim of developing a suitable chemistry for azide precursors for OMVPE of the group 13 nitrides.…”