2009
DOI: 10.1002/fld.2140
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Numerical algorithms for modelling electrodeposition: Tracking the deposition front under forced convection from megasonic agitation

Abstract: SUMMARYElectrodeposition is a widely used technique for the fabrication of high aspect ratio microstructures. In recent years, much research has been focused within this area aiming to understand the physics behind the filling of high aspect ratio vias and trenches on substrates and in particular how they can be made without the formation of voids in the deposited material. This paper reports on the fundamental work towards the advancement of numerical algorithms that can predict the electrodeposition process … Show more

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Cited by 14 publications
(12 citation statements)
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“…Where the ionic mobility u i , is assumed to be related to the diffusion coefficient D i by the Nernst-Einstein equation [32] that demonstrates the benefits of modeling of electrodeposition to predict plating outcomes [25][26][27]. For example Obaid et al, modeled the electroplating of hexavalent chromium to optimize the electrode spacing and anode height to obtain uniform thickness of the coating [28].…”
Section: Introductionmentioning
confidence: 99%
“…Where the ionic mobility u i , is assumed to be related to the diffusion coefficient D i by the Nernst-Einstein equation [32] that demonstrates the benefits of modeling of electrodeposition to predict plating outcomes [25][26][27]. For example Obaid et al, modeled the electroplating of hexavalent chromium to optimize the electrode spacing and anode height to obtain uniform thickness of the coating [28].…”
Section: Introductionmentioning
confidence: 99%
“…As a result, in each time step we know the exact position of the interface. The EITM is implemented in FORTRAN, its preliminary version is described in [6,7]. At the end of each time step, the method determines the current position of the interface, computes the amount of copper deposited in this step, and updates the distribution of copper ions in the part of the domain that corresponds to the electrolyte.…”
Section: Modelingmentioning
confidence: 99%
“…For Eulerian description of particle transport, an m-th order deposition reaction [23][24][25] can be conveniently used. Asphaltene particle deposition [23], SiO2 deposition [26] and copper electrodeposition [27] have been modeled as first order reaction. Besides, experimentally developed empirical correlations for modeling of particle deposition has been proposed and employed [28].…”
Section: Introductionmentioning
confidence: 99%