Item Type ArticleAuthors Emira, Ahmed; AbdelGhany, M.; Elsayed, M.; Elshurafa, Amro M.; Sedky, S.; Salama, Khaled N.Abstract-In this work, two high-voltage charge pumps are introduced. In order to minimize the area of the pumping capacitors, which dominates the overall area of the charge pump, high density capacitors have been utilized. Nonetheless, these high density capacitors suffer from low breakdown voltage which is not compatible with the targeted high voltage application. To circumvent the breakdown limitation, a special clocking scheme is used to limit the maximum voltage across any pumping capacitor. The two charge pump circuits were fabricated in a 0.6µm CMOS technology with poly0-poly1 capacitors. The output voltage of the two charge pumps reached 42.8V and 51V while the voltage across any capacitor did not exceed the value of the input voltage. Compared to other designs reported in the literature, the proposed charge pump provides the highest output voltage which makes it more suitable for tuning MEMS devices. Index Terms-Charge pump, high voltage, MEMS interface, polarization voltage, DC-DC converters I. INTRODUCTION D ESPITE the continuous demand for reducing the supply voltage and the power consumption of integrated circuits [1, 2], there are some applications that still require high voltage operation, such as MEMS devices, EEPROM programmers [3-8], power switches [9], LCD and line drivers [10]. To meet the high voltage requirement, capacitive charge pumps are used in light load applications, while step-up DC-DC converters are used in heavy load applications [11][12][13][14][15][16][17]. Most of charge pump (CP) topologies in the literature [2,[18][19][20] are based on the Dickson charge pump [21], which is shown in Fig. 1, where the output voltage is given by:where N is the number of stages, V IN is the input voltage, and V ti and V to are the threshold voltages of the i th stage (where i = 1, 2, · · · , N ) and the output stage, respectively. This architecture suffers from the continuous increase in the threshold voltage from stage to stage due to the increase in the bulk-source voltage of M i transistor as i increases. Furthermore, the maximum attainable output voltage is limited by