Semiconductor and Ceramic Microstructure Made by Single Mode Fiber Laser

Pawlak, Ryszard; Tomczyk, Mariusz; Walczak, Maria; Domagalski, P.

doi:10.1088/1742-6596/494/1/012015

Cited by 7 publications

(6 citation statements)

References 15 publications

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“…Methods of ablative removal of layers with laser radiation allow precise shaping of conductive elements, or microfluidic structures, sensors, etc. [29][30][31][32]. Laser modification is widely used in many industries.…”

Section: The Laser Modification Of Textile Composite Substratementioning

confidence: 99%

The Influence of Laser Modification on a Composite Substrate and the Resistance of Thin Layers Created Using the PVD Process

Korzeniewska

Tomczyk

Walczak

2020

Sensors

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For physical vapor deposition (PVD) technology, cleaning a substrate is one of the key preliminary processes before depositing the metal layer. In this article, we present the results of research on the modification of a textile composite substrate using laser technology and its influence on the surface resistance of silver structures intended for use in wearable electronics. As a result of the substrate modification, the resistance of the layers increased as compared with the structures produced on an unmodified substrate. An experimental planning technique was used to optimize the laser modification process.

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Section: The Laser Modification Of Textile Composite Substratementioning

confidence: 99%

The Influence of Laser Modification on a Composite Substrate and the Resistance of Thin Layers Created Using the PVD Process

Korzeniewska

Tomczyk

Walczak

2020

Sensors

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“…System laserowy [8,10,11] wykorzystany do mikroobróbki składał się z jednomodowego lasera włóknowego oraz skanera wiązki. Parametry zastosowanej aparatury zamieszczono w tabl.…”

Section: Wytwarzanie Mikrostruktur Krzemowych Ceramicznych I Metalicunclassified

“…4 pokazano efekty mikroobróbki elementów krzemowych i ceramicznych laserem włóknowym. Ocenę jakości odwzorowania geometrii zaprojektowanych struktur mikrofluidycznych zawarto w [8,10].…”

Section: Wytwarzanie Mikrostruktur Krzemowych Ceramicznych I Metalicunclassified

Application of fiber lasers in electronics and in microsystems technology

2016

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Przedstawiono wybrane wyniki zastosowania lasera włóknowego w wytwarzaniu elementów mikrosystemów i biernych elementów elektroniki o submilimetrowych wymiarach z materiałów półprze-wodnikowych, ceramicznych i przewodzących. Technologie laserowe w tej skali wykorzystują ablacyjne oddziaływanie wiązki laserowej. Optymalizowanie procesów w dużej mierze było wspierane modelowaniem komputerowym. Wyniki potwierdzają możli-wość precyzyjnej mikroobróbki za pomocą lasera generującego impulsy nanosekundowe. SŁOWA KLUCZOWE: impulsy nanosekundowe, lasery włóknowe, ablacja, krzem, ceramika Selected results of the use of fiber laser for producing elements of microsystems and passive electronic elements of submillimeter dimensions in semiconductor, ceramic and conductive materials are presented. Laser technology at this scale uses ablative interaction of laser beam. Optimization of processes was significantly supported by computer modelling. The results confirm the possibility of precise micromachining using a laser with nanosecond pulses.

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“…During a single beam scan, a material layer with a thickness of 1 to 5 µm is removed. The ablation method with nanosecond pulses has been successfully used for cutting out unusual shapes of photovoltaic cells [4], surface treatment of silicon and ceramics [5,6], or texturing of rubber surfaces [7]. Laser technologies can also be used in the production of thin-film meta-material structures [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Optimization of the Ablative Laser Cutting of Shadow Mask for Organic FET Electrode Fabrication

2020

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This article presents an ablative method of cutting masks from ultra-thin metal foils using nanosecond laser pulses. As a source of laser radiation, a pulsed fiber laser with a wavelength of 1062 nm with the duration of pulses from 15 to 220 nanoseconds (ns), was used in the research. The masks were made of stainless-steel foil with thicknesses of 30 µm, 35 µm, and 120 µm. Channels of different lengths from 50 to 300 µm were tested. The possibilities and limitations of the presented method are described. The optimization of the cutting process parameters was performed using the experiment planning techniques. A static, determined complete two-level plan (SP/DC 24) was used. On the basis of the analysis of the test structures, we designed and produced precise shading masks used in the process of organic field effect transistor (OFET) electrode evaporation. The ablative method proved suitable to produce masks with canals of minimum lengths of 70 µm. It offers facile, fast, and economically viable shadow mask fabrication for organic electronics applications, which moreover might enable fast prototyping and circuit design.

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Semiconductor and Ceramic Microstructure Made by Single Mode Fiber Laser

Cited by 7 publications

References 15 publications

The Influence of Laser Modification on a Composite Substrate and the Resistance of Thin Layers Created Using the PVD Process

The Influence of Laser Modification on a Composite Substrate and the Resistance of Thin Layers Created Using the PVD Process

Application of fiber lasers in electronics and in microsystems technology

Optimization of the Ablative Laser Cutting of Shadow Mask for Organic FET Electrode Fabrication

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