2018
DOI: 10.1007/s10404-018-2118-5
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Soft lithography based on photolithography and two-photon polymerization

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Cited by 45 publications
(27 citation statements)
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“…This type of polymer is commonly a simple mixture of the two compounds although it is possible to integrate the photoinitiator into the polymer itself. 8 Popular reactive moieties include epoxy, 9 thiol-ene, [10][11][12] and acrylate chemistries and are matched with a compatible photoinitiator chemistry. For example, SU-8 is a popular biocompatible polymer designed for the microelectronics industry but has found uses in biomedical research; this polymer uses epoxy ring-opening chemistries combined with a photoacid generator.…”
Section: A)mentioning
confidence: 99%
“…This type of polymer is commonly a simple mixture of the two compounds although it is possible to integrate the photoinitiator into the polymer itself. 8 Popular reactive moieties include epoxy, 9 thiol-ene, [10][11][12] and acrylate chemistries and are matched with a compatible photoinitiator chemistry. For example, SU-8 is a popular biocompatible polymer designed for the microelectronics industry but has found uses in biomedical research; this polymer uses epoxy ring-opening chemistries combined with a photoacid generator.…”
Section: A)mentioning
confidence: 99%
“…This technology allows the fabrication of predesigned microstructures using various designs of molds, photomasks, and stamps [ 47 ]. Soft lithography also can be viewed as a complementary technique for photolithography as it can be used as a template to fabricate geometrically complex structures with biocompatible materials, allowing the creation of biological systems for cell/tissue growth [ 48 ]. The common material used in soft lithography is polydimethylsiloxane (PDMS), which can be classified into four core techniques: (1) Replica molding: simply duplicated the required structures by just pouring the PDMS on the predesigned pattern and cured ( Figure 3 A) [ 6 , 36 , 37 , 49 , 50 , 51 , 52 ].…”
Section: Lab-on-a-chip Microfabrication Methodsmentioning
confidence: 99%
“…The application range of two-photon lithography ranges from the fabrication of photonic crystals 35 , cell scaffolds 36 to metamaterials 37 , biomimicry 38 , and additive manufactured microfluidics 39 . Two-photon lithography has been used 40 to incorporate optical components (e.g., a total internal reflecting mirror) with a microfluidic channel using soft lithography and to demonstrate the integration of a three-dimensional microfluidic mixer into photolithographically fabricated areas on a glass coverslip 41 . In this paper, we enhance the strategy of combining conventional UV lithography with two-photon direct laser writing to approach the nanofluidic regime on a silicon surface.…”
Section: Introductionmentioning
confidence: 99%