“…Agglomeration of polycrystalline NiSi occurs over 650°C, which leads to increasing sheet resistance [3,4]. In order to stabilize NiSi, the incorporation processes of the third elements such as Pt, Pd, Ti, N and SiO 2 into Ni/Si system were reported [5][6][7][8][9]. On the other hand, incorporation of C into Si promises several advantages for Si devises, such as energy band engineering [10], controlling impurity diffusion in Si and SiGe substrates [11], and the introduction of the tensile-strain in a Si channel [12].…”