2017
DOI: 10.7567/jjap.56.04cd10
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Structural advantages of silicon-on-insulator FETs over FinFETs in steep subthreshold-swing operation in ferroelectric-gate FETs

Abstract: In this paper, we discuss the subthreshold operation of fully depleted silicon-on-insulator FETs (SOI-FETs) and FinFETs, with embedded ferroelectric negative-capacitance gate insulators, using technology computer-aided design simulations. SOI-FETs with ultrathin buried-oxide layers and appropriate workfunctions for bottom electrodes are found to be more preferable to attain steep subthreshold swings lesser than 60 mV/decade, because SOI-FETs can effectively enable a voltage drop in the ferroelectric layer, eve… Show more

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Cited by 12 publications
(6 citation statements)
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“…Analysis reported that there is degradation in SS value for FinFET with embedded ferroelectric layer than SOI FET. 17 Comparative analysis reveals that NC-FinFET having HfZrO x as ferroelectric layer possess better switching and drain current characteristic among Conventional FET, Fe-FET, Conventional FinFET, and Fe-FinFET. 18 A SS value of 8.5 mV/dec.…”
Section: Introductionmentioning
confidence: 97%
“…Analysis reported that there is degradation in SS value for FinFET with embedded ferroelectric layer than SOI FET. 17 Comparative analysis reveals that NC-FinFET having HfZrO x as ferroelectric layer possess better switching and drain current characteristic among Conventional FET, Fe-FET, Conventional FinFET, and Fe-FinFET. 18 A SS value of 8.5 mV/dec.…”
Section: Introductionmentioning
confidence: 97%
“…Negative capacitance (NC) field-effect transistor (NC-FET) has been proposed as one of the promising candidates beyond complementary metal-oxide-semiconductor (CMOS) device that may overcome the thermionic limit of 60 mV dec −1 by the internal amplification of gate voltage through ferroelectric materials 37 . Owing to their atomically thin body nature, two-dimensional (2D) transition metal dichalcogenides (TMDs) have been demonstrated to provide superior immunity to short-channel-effects 811 and suggested to achieve steep subthreshold slope over a wide voltage range for the NC-FET 1214 . NC-FETs have been reported with TMDs as channel material and ferroelectric hafnium zirconium oxide (HZO) 1517 or polymer 14,18 as ferroelectric gate.…”
Section: Introductionmentioning
confidence: 99%
“…The simulation study demonstrated that a thin body and a thin BOX SOI NCFET [Fig. 17 66) This is mainly because the SOI NCFET has a larger substrate capacitance with a thin BOX and better capacitance matching. Thus, the NC effect is beneficial to mature planar SOI transistor technologies, and an ultralow-power NCFET can be realized by a low-cost process.…”
Section: Ncfet With Fe-hfomentioning
confidence: 99%