2010 Proceedings of the European Solid State Device Research Conference 2010
DOI: 10.1109/essderc.2010.5618418
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Sub-60nm Si tunnel field effect transistors with I<inf>on</inf> &#x003E;100 &#x00B5;A/&#x00B5;m

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Cited by 13 publications
(8 citation statements)
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“…As a result, the body of T1 and the gate of T2 (B1/G2) are charged up to the voltage of BL1 with the band-to-band (BTB) tunneling current. The design of the G/S overlap region, which affects the BTB current greatly [11], [13], is very crucial to achieve fast write-"1." As shown in the process scheme, once a poly gate is deposited, a super heavy boron (p ++ ) implantation aligned to the source-side gate edge is implemented before the spacer formation to form a source with dopant density as high as 5 × 10 20 /cm 3 in T1.…”
Section: Fbgc Prototype Fabricationmentioning
confidence: 99%
“…As a result, the body of T1 and the gate of T2 (B1/G2) are charged up to the voltage of BL1 with the band-to-band (BTB) tunneling current. The design of the G/S overlap region, which affects the BTB current greatly [11], [13], is very crucial to achieve fast write-"1." As shown in the process scheme, once a poly gate is deposited, a super heavy boron (p ++ ) implantation aligned to the source-side gate edge is implemented before the spacer formation to form a source with dopant density as high as 5 × 10 20 /cm 3 in T1.…”
Section: Fbgc Prototype Fabricationmentioning
confidence: 99%
“…Steep switching originating from band-to-band tunneling (BTBT) results in subthreshold swing (SS) values lower than 60 mV=dec, which is the physical limit of MOSFETs at room temperature. [1][2][3][4][5][6][7][8][9][10][11] Thus, TFETs are expected to be building blocks for low-power-consumption large-scale integrated circuits (LSIs).…”
Section: Introductionmentioning
confidence: 99%
“…Some pioneering research results have been reported for the purpose of low R TUN [3,8]. As a result, recently, I ON of TFETs have risen at a steady pace [9,10]. In particular, III-V TFETs may achieve larger tunneling current compared with Si TFETs due to their smaller bandgap energy and smaller electron mass [11,12].…”
Section: Tunneling-dominant Tfets Vs Drift-dominant Tfetsmentioning
confidence: 99%