The influence of a glow discharge treatment on surface modification and outgassing rate of stainless steel and titanium alloys

Garke, B.; Edelmann, Christian; Ehrt, M.

doi:10.1016/0042-207x(95)00255-3

Cited by 8 publications

(5 citation statements)

References 5 publications

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“…Because surface area is a function of the diameter squared, the small difference in powder diameter between the NMI and Crucible blends could have notable effects. Several sources have reported that hydrogen and water vapor (moisture) dominate outgassing of varied titanium alloys (Homma et al, 1995;Minato et al, 1995;Calcatelli et al, 1995;Garke et al, 1996). Moreover, as was found in the present study, these sources similarly detected residual traces of desorbed nitrogen, carbon dioxide, and carbon monoxide (Homma et al, 1995;Minato et al, 1995;Calcatelli et al, 1995;Garke et al, 1996).…”

Section: Discussionsupporting

confidence: 85%

“…Several sources have reported that hydrogen and water vapor (moisture) dominate outgassing of varied titanium alloys (Homma et al, 1995;Minato et al, 1995;Calcatelli et al, 1995;Garke et al, 1996). Moreover, as was found in the present study, these sources similarly detected residual traces of desorbed nitrogen, carbon dioxide, and carbon monoxide (Homma et al, 1995;Minato et al, 1995;Calcatelli et al, 1995;Garke et al, 1996). Initially, the presence of hydrogen was a concern as hydrogen embrittlement can be potentially harmful.…”

Section: Discussionsupporting

confidence: 80%

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Titanium alloy powder preparation for selective laser sintering

Engel

Bourell

2000

Rapid Prototyping Journal

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Selective laser sintering (SLS) is a solid freeform fabrication process whereby a part is built layerwise by scanning a powder bed. The processability of metal powder varies depending on the state of the powder prior to SLS. A powder thermal pre‐treatment was developed which involved degassing the powder at an elevated temperature in a vacuum. Without powder thermal pre‐treatment, the powder may flow poorly and may “ball” or form molten clumps during the laser exposure rather than wetting into the present and previous layer. These effects result in SLS parts with poor surface finish, mechanical properties and density. The purpose of this study was to identify for titanium alloy powder the mechanisms responsible for the improvements obtained after powder thermal pre‐treatment and to optimize the thermal excursion.

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Section: Discussionsupporting

confidence: 85%

Section: Discussionsupporting

confidence: 80%

Titanium alloy powder preparation for selective laser sintering

Engel

Bourell

2000

Rapid Prototyping Journal

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“…However, plasma cleaning began later to be widely applied in various technological processes: degassing the surfaces of discharge vessels, cleaning silicon wafers from carbon impurities, removing impurities from the electrodes 035 and walls of technological vessels which had formed during deposition of semiconducting and polymer materials, cleaning plane items and other devices from lubricants, grease removal and preparation of surfaces for dying, removal of metallic impurities from the surfaces of ceramic insulators, restoration of metallic archaeological artefacts, etc. [12][13][14][15][16][17][18][19][20][21][22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Applying RF current harmonics for end-point detection during etching multi-layered substrates and cleaning discharge chambers with NF3 discharge

Lisovskiy¹,

Booth

Landry³

et al. 2007

Vacuum

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The present paper reports the results of studying the characteristics of the etching process of multi-layered materials (Si 3 N 4 /SiO 2 /Si and SiO 2 /Si) and of cleaning technological chambers covered with silicon nitride films (Si 3 N 4 ) in a NF 3 RF capacitive discharge. The process of chamber cleaning was monitored with a mass spectrometer. The gas pressure, RF voltage amplitude, current-voltage phase shift, ohmic current as well as the second harmonic of the RF current were also recorded. The opportunity of using these parameters for end-point detection of etching and plasma cleaning is discussed. It is found that the second harmonic of the RF current may be successfully used for end-point detection of multi-layered materials etching and to monitor the cleaning process of technological chambers. The cleaning of chambers of complicated design may possess a double-stage pattern. r

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“…Pure, thick oxide layers as are created by A d 0 2 discharges [65,67] are known to lower electron field emission [65,921, although large effects on breakdown strength from thick oxide layers were not expected [92]. Differences in cathode spot electrode damage, erosion rates, and mobility have been correlated with the presence ofcontaminated surfaces [71,93], and could also be relevant.…”

Section: Ion Diodesmentioning

confidence: 99%

“…These results show that quantity of desorbed material is decreased and the average mass of the desorbates has been reduced, primarily through reduction of Ha. Related work showed that Ad02 cleaning reduced the outgassing of metals in vacuum through the formation of a thick oxide layer in vacuum [67]. …”

Section: Cleaning and Conditioning Techniquesmentioning

confidence: 99%

The effects of electrode cleaning and conditioning on the performance of high-energy, pulsed-power devices

Cuneo

Proceedings ISDEIV. 18th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.98CH36073)

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-High-energy pulsed-power devices routinely access field strengths above those at which broad-area, cathode-initiated, high-voltage vacuum-breakdown occur (> le7 -3e7 V/m). Examples include magnetically-insulatedtransmission-lines and current convolutes, high-currentdensity electron and ion diodes, high-power microwave devices, and cavities and other structures for electrostatic and RF accelerators. Energy deposited in anode surfaces may exceed anode plasma thermal-desorption creation thresholds on the time-scale of the pulse. Stimulated desorption by electron or photon bombardment can also lead to plasma formation on electrode or insulator surfaces. Device performance is limited above these thrFsholds, particularly in pulselength and energy, by the formation and expansion d plasmas formed primarily fiom electrode contaminants. Insitu conditioning techniques to modify and eliminate the contaminants through multiple high-voltage pulses, low base pressures, RF discharge cleaning, heating, surface coatings, and ion-and electron-beam surface treatment allow access to new regimes of performance through control of plasma formation and modification of the plasma properties. Experimental and theoretical progress h m a variety of devices and small scale experiments with a variety of treatment methods will be reviewed and recommendations given for future work.

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The influence of a glow discharge treatment on surface modification and outgassing rate of stainless steel and titanium alloys

Cited by 8 publications

References 5 publications

Titanium alloy powder preparation for selective laser sintering

Titanium alloy powder preparation for selective laser sintering

Applying RF current harmonics for end-point detection during etching multi-layered substrates and cleaning discharge chambers with NF3 discharge

The effects of electrode cleaning and conditioning on the performance of high-energy, pulsed-power devices

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