2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) 2007
DOI: 10.1109/memsys.2007.4433037
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Tunable light grating integrated with high-voltage driver IC for image projection display

Kazuhiro Takahashi
1
,
Hiroyuki Fujita
2
,
Hiroshi Toshiyoshi
3
et al.
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Cited by 9 publications
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References 7 publications
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A study on process-compatibility in CMOS-first MEMS-last integration

Takahashi
1
,
Mita
2
,
Fujita
3
et al. 2008
2008 IEEE Custom Integrated Circuits Conference
7
0
4
0
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A study on process-compatibility in CMOS-first MEMS-last integration

Takahashi
1
,
Mita
2
,
Fujita
3
et al. 2008
2008 IEEE Custom Integrated Circuits Conference
7
0
4
0
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A wafer-level system integration technology for flexible pseudo-SOC incorporates MEMS-CMOS heterogeneous devices

Yamada
1
,
Onozuka
2
,
Iida
3
et al. 2010
2010 IEEE CPMT Symposium Japan
3
0
2
0
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A wafer-level heterogeneous technology integration for flexible pseudo-SoC

Yamada
1
,
Onozuka
2
,
Iida
3
et al. 2010
2010 IEEE International Solid-State Circuits Conference - (ISSCC)
7
0
0
0
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