1984
DOI: 10.1103/physrevb.29.3482
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Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films

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Cited by 1,081 publications
(381 citation statements)
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“…These indicate that the increasing annealing temperature is associated with an the ordering of sp 2 clusters in the film, and high temperature in 700 o C finally led to the change to a graphite-like structure. 12,14,15 Also, the adhesion behavior of carbon films decreased with increasing annealing temperature, indicating an increase in ordered sp 2 clusters in the carbon networks and a decrease in cross-linked bonds between the film and substrate. 7,14 However, intrinsic stress gradually decreased with increasing annealing temperature.…”
Section: Resultsmentioning
confidence: 99%
“…These indicate that the increasing annealing temperature is associated with an the ordering of sp 2 clusters in the film, and high temperature in 700 o C finally led to the change to a graphite-like structure. 12,14,15 Also, the adhesion behavior of carbon films decreased with increasing annealing temperature, indicating an increase in ordered sp 2 clusters in the carbon networks and a decrease in cross-linked bonds between the film and substrate. 7,14 However, intrinsic stress gradually decreased with increasing annealing temperature.…”
Section: Resultsmentioning
confidence: 99%
“…In literature, Gaussians are common 32,33 , but also asymmetrical line shapes as the Breit-WignerFano (BWF) are used 18,34 . The use of an asymmetric line shape is justified by the asymmetry of the vibrational density of states (DOS) towards lower wave numbers for graphite and amorphous carbon in the region of the D and G lines 35 . Asymmetrical line shapes allow fitting the whole spectrum with only two peaks, e.g.…”
Section: Peak Fittingmentioning
confidence: 99%
“…The G peak at around 1580-1600 cm -1 has been assigned to the scattering by sp 2 bonded carbon associated with graphite. The D peak at around 1350 cm -1 is associated with the disorder due to the formation of sp 3 bonded between graphite adjacent planes [34,35]. Intensity Fig.…”
Section: Materials Resultsmentioning
confidence: 99%