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The report describes an original method of calibrating an autonomous unit of wireless accelerometers manufactured by Microdevices Laboratory, Ltd [1]. Without the use of precision rotary tables, centrifuges, and an independent basement (against vibrations), it is possible to reduce the error caused by the mismatch (not orthogonal)of sensor’s axes. Zero and scale factors of the sensor unit are calibrated with great precision. The calibration of the sensor unit with a measuring range of 2 g, produces the following results: the standard deviation of the vector g, measured in more than 100 different static positions is less than 0.001 g. Thus, the parameters of the initial three-axis accelerometer, used in the block of firm Microdevicelab, improved by more than 50 times.

Abstract-In the paper, new principles and methods for determining the transfer characteristic parameters for a micromechanical angular velocity sensor, as well as an assessment of the significance and efficiency of these parameters, have been described. The structure and algorithms for obtaining and processing calibration coefficients for implementing the MEMS self-calibration functions have been developed. The possibilities and degree of automation of processes for obtaining individual characteristics, testing and calibration have been determined.

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