We report a novel compact CMOS sensor enabling the measurement of both in-plane magnetic field components B x and B y at the same location. The sensor consists of four nwells arranged essentially as a square and electrically interconnected into a conducting loop. Four contacts, one at the center of each n-well, serve as drive and sense contacts. The sensing principle is the same as in established vertical Hall sensors. By selectively switching the interconnections among the n-wells, the device is made sensitive alternatingly to B x and B y . The sensitivity for both directions is about 5.6 mV/VT. At a nominal B field of 3.7 mT the RMS error of the measured magnitude and angle of B are 56 µT and 0.8°, respectively.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.