We have developed a laser and focused ion beam (FIB) compound system to process an optical component device with an ultrafine precision minute surface structure and a micromedical device. This machine consists of an FIB and three types of lasers with an atomic force microscope. This system can fabricate decamicrometer area by laser and submicrometer area by FIB at one chuck. When processing the press mold die of a microlens array (10x10) in a glasslike carbon with a femtosecond laser, a diameter of 3.2 microm and depth of 0.43 microm are obtained. However, the surface roughness is more than Rz=0.5 microm. After this process, we finished this surface with the use of the FIB. As a result, the surface roughness is less than Rz=0.05 microm.
Compared to their male counterparts, females the world over typically achieve lower levels of pay, status, and representation. But the patterns of gender gaps in wages and power across countries and across sectors within countries point to systematic and empirically testable propositions about the supply and demand of labor and the bargaining consequences of remuneration. Time constraints on females, on account of socially mandated family work, hinder their advancement in endeavors that put a premium on availability and continuous career investment.
A local vacuum system for focused ion beam (FIB) processing, with a workpiece set in the air, has been developed. The local vacuum apparatus had a double-wall cylinder structure, used a differential exhaust, and each cylinder was connected to a vacuum exhaust pump. When the gap between the workpiece and the apparatus was 10 microm, the pressure of beam line in the machining head achieved 2.1 x 10(-3) Pa. In addition, a visualization system was developed by visualizing the current flow out from a sample by FIB irradiation. With this system, it is possible to conduct focus adjustments of the FIB and shape recognition on a workpiece in the order of microns.
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