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An improved Penning ion source has been developed. This ion source has two helical filaments at the two ends of the discharge chamber. The design of the filaments is such that the resultant magnetic field distribution, which is a combination of the external field and those due to the two filaments, focuses the electrons from the filaments to the plasma region near to the lateral extraction slit, thus creating a hollow cathode effect. This produces an efficient discharge and a good positive ion output. This ion source can produce various species of ions including the ions of reactive gases with a longer lifetime of filaments than for comparable sources.

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