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Positron annihilation was used to probe vacancies in Cu films deposited by Ta/SiO2/Si using electroplating and sputtering techniques. During room temperature grain growth (i.e., self-annealing) of the Cu films, two different types of vacancies (small vacancy clusters such as divacancies and large vacancy agglomerates) were introduced into grains; the formation of such defects was enhanced by residual impurities. For electroplated Cu, isochronal annealing experiments revealed further agglomeration of vacancies when annealing was done below 300 °C, and these agglomerates started to dissociate above 350 °C. The effect of impurities on the vacancy agglomerates disappeared in the defect recovery stage (≥350 °C).

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