We have developed a 36-inch surface-conduction electron-emitter display (SED), consisting of surface conduction electron emitters (SCEs) and a phosphor screen for CRTs. The main features of the prototype are luminance of 400 cd/m 2 , contrast ratio of 10,000: 1 in a dark room, and response time of <1 ms. The SED panel offers sufficient performance for application to TVs.

Abstract— A surface‐conduction electron emitter (SCE) for next‐generation flat‐panel displays has been developed. PdO thin films (approximately 10 nm thick) produced by an ink‐jet process were used to form the surface‐conduction electron emitter. The films were electroformed and activated while a voltage was applied, and an electron emitter with good characteristics was obtained. A current density of approximately 30 mA/cm2 was attained when an anode voltage of 10 kV was applied. Furthermore, a 36‐in. surface‐conduction electron‐emitter display (SED), consisting of SCEs and a phosphor screen similar to that of a CRT, was also developed.

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A new design for a "double-frame" vibratory silicon gyroscope is described. The gyroscope consists of two frames and corresponding springs. The inner frame has electrode fingers and is suspended from the outer frame, which has sensing springs.The outer frame is linked to the substrate by driving springs. This decoupling of the lateral driving and sensing motions makes the structure easy to design and improves the S/N ratio. The gyroscope has a glass/silicon/glass structure with through-hole electrodes on one face. It is fabricated by the deep dry etching of silicon and low-pressure wafer-to-wafer anodic bonding. The noise and the linearity is less than 1% for angular rates from -250 toThe overload resistance is over 1500G for 0.5ms, and the reliability of the package has been confirmed.

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