2008
DOI: 10.1088/0268-1242/23/4/045005
|View full text |Cite
|
Sign up to set email alerts
|

Barrier inhomogeneities of tungsten Schottky diodes on 4H-SiC

Abstract: Electrical properties of tungsten on silicon carbide (4H-SiC) Schottky diodes are investigated through the analysis of the forward current-voltage (I-V) characteristics measured at elevated temperatures within the range of 303-448 K. The subsequently derived Schottky barrier heights (SBHs) and ideality factors are found to be temperature dependent with distributions that are adequately explained within the framework of the model proposed by Tung in which he considers the barrier at a metal-semiconductor interf… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

4
43
0

Year Published

2010
2010
2023
2023

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 68 publications
(47 citation statements)
references
References 42 publications
4
43
0
Order By: Relevance
“…The small value of the extracted Richardson's constant is interpreted as an indication that the actual area of the contact is much smaller than the device area. 4,7,20 The structural composition of the interface between the Ti and SiC was investigated by x-ray diffraction (XRD) measurements, performed on each of the six Ti Schottky metal contacts deposited at 28 o C to 900 o C. The XRD scans were performed on four Schottky contacts on each sample and it was verified that the scans from each sample were consistent. Figure 7 shows the 2θ scans obtained from these samples.…”
Section: Resultsmentioning
confidence: 99%
“…The small value of the extracted Richardson's constant is interpreted as an indication that the actual area of the contact is much smaller than the device area. 4,7,20 The structural composition of the interface between the Ti and SiC was investigated by x-ray diffraction (XRD) measurements, performed on each of the six Ti Schottky metal contacts deposited at 28 o C to 900 o C. The XRD scans were performed on four Schottky contacts on each sample and it was verified that the scans from each sample were consistent. Figure 7 shows the 2θ scans obtained from these samples.…”
Section: Resultsmentioning
confidence: 99%
“…6. The deviation in the experimental ln(I 0 /T 2 ) versus 1/kT curve at low temperatures can be explained by the temperature depended of the BH and ideality factor due to the presence of the spatially inhomogeneous BH and potential [1,[21][22][23][24][25][26][27][28][29][30][31][32][33][34]. The current through the diode flows preferentially through the lower barriers in the potential distribution.…”
Section: Temperature Dependent I-v Characteristics Ofmentioning
confidence: 99%
“…We also investigated whether there was a correlation between reported metallurgical reactions at the metal-semiconductor interface and our observed electronic aspects. Understanding contact properties is important for eventual better device control [26].…”
Section: Introductionmentioning
confidence: 99%