Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications

Shao, Zhichun; Pala, Sedat; Peng, Yande; Lin, Liwei

doi:10.1109/jmems.2021.3090374

Cited by 24 publications

(10 citation statements)

References 20 publications

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“…For example, a bimorph structure is an effective way for pMUTs to enhance sensitivities, where the membrane of a pMUT contains two piezoelectric layers [ 73 , 74 ]. Because the number of piezoelectric layers is doubled, the vibration displacement and acoustic pressure of bimorph pMUTs are much larger than those of unimorph ones [ 75 ]. Shao et al utilized a bimorph structure and developed a pMUT rangefinder derivative system to detect a target over 1 m away with a more than

field of view [ 76 ], which was greater than the

field of view of a unimorph design [ 13 ].…”

Section: Advancements Of Pmut Rangefinders Based On Improvements Of P...mentioning

confidence: 99%

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

et al. 2023

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Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive attention to mobile range-finding. pMUT rangefinders with different strategies to enhance range-finding performance have been developed, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, and the improvements of range-finding methods. This work briefly introduces the working principle of pMUT rangefinders and then provides an extensive overview of recent advancements that improve the performance of pMUT rangefinders, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Finally, several derivative systems of pMUT rangefinders enabling pMUT rangefinders for broader applications are presented.

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field of view [ 76 ], which was greater than the

field of view of a unimorph design [ 13 ].…”

Section: Advancements Of Pmut Rangefinders Based On Improvements Of P...mentioning

confidence: 99%

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

et al. 2023

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“…Piezoelectric micromachined ultrasonic transducers (pMUTs) [21], [22], [23] and bulk piezoelectric transducers can be used for low-power air-channel ultrasound detection. proposed in [24] operates with only 6-V pp driving voltage.…”

Section: Fully Differential Charge-reuse High-voltage Txmentioning

confidence: 99%

“…As shown in Fig. 10(a), the CRHV-TX [10] driving a biomorph pMUT [21] uses 4-2 V DDH to drive V p and 0-2 V DDH to drive V n , resulting in a 4-V DDH differential driving signal. To increase the driving voltage even further, we propose a 28 V PP FDCR-HVTX driver in the 180-nm standard CMOS.…”

Section: Fully Differential Charge-reuse High-voltage Txmentioning

confidence: 99%

An Ultrasound Imaging System With On-Chip Per-Voxel RX Beamfocusing for Real-Time Drone Applications

Guo

Jiang

et al. 2022

IEEE J. Solid-State Circuits

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For drone vision and navigation, low-power 1 3-D depth sensing with robust operations against strong/weak 2 light and various weather conditions is crucial. CMOS image 3 sensor (CIS) and light detection and ranging (LiDAR) can 4 provide high-fidelity imaging. However, CIS lacks depth 5 sensing and has difficulty in low light conditions. LiDAR is 6 expensive with issues of dealing with strong direct interference 7 sources. Ultrasound imaging system (UIS), on the other hand, 8 is robust in various weather and light conditions and is 9 cost-effective. However, in air channel, it often suffers from long 10 image reconstruction latency and low framerate. To address 11 these issues, we present a UIS application-specific integrated 12 circuit (ASIC) that adopts the one-shot transmitter (TX) and 13 on-chip per-voxel receiver (RX) beamfocusing (PV-RXBF) 14 image reconstruction scheme. The ASIC adopts the designs of 15 fully differential charge-reuse high-voltage TX (FDCR-HVTX), 16 digital back-end (DBE), and an on-chip power management unit 17 (PMU). FDCR-HVTX generates 28 V pp pulses and reduces the 18 average power consumption by 25% by charge reuse (CR). The 19 DBE achieves 7.76-µs processing latency and 9.83M-FocalPoint/s 20 throughput to effectively translate real-time 3-D image streaming 21 at 24 frames/s. A prototype UIS, with an 8 × 8 bulk piezo 22 transducer array, is assembled with the proposed ASIC and 23 a wireless data transmission module [field-programmable gate 24 array (FPGA) + ESP32] on an entry-level consumer drone, 25 and the real-time wireless 3-D image streaming at 24 frames/s 26 with a range of 7 m is verified while the drone is flying.

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“…Micromachined ultrasonic transducers (MUTs) are best known for their capability to provide medical diagnostics in the form of ultrasonic images [1] in human body or liquid [2]. In recent years, MUT applications have been expanded in the air medium such as range finders [3][4][5], fingerprint sensing [6,7], human machine interface [8,9], gesture recognition [10], surface metrology [11,12], and more. There are two transduction mechanisms in MUTs: the capacitive [13] and piezoelectric scheme [14].…”

Section: Introductionmentioning

confidence: 99%

An Improved Lumped Element Model for Circular-Shape pMUTs

Pala

Lin

2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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This paper presents an improved lumped element model for clamped, circular-shape, piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent circuit is developed to include electrical, mechanical, and acoustic domains, which are analyzed separately and combined with the associated couplings. For the first time, a two-term mode shape approach is adapted to reveal intrinsic and extrinsic properties of a pMUT, such as equivalent circuit parameters, input impedance, velocity, displacement, bandwidth, quality factor, directivity, and the on-axis pressure in the near and far field. These properties are compared with prior reports in the literature and exact solutions, as well as Finite Element Method (FEM) simulations. The errors relative to exact solution for all these properties are below 0.5%. These improvements in error are from 5x to about 3 orders of magnitude better than those of prior works. As such, the improved model could be helpful in design and simulation tools for pMUTs.

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Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications

Cited by 24 publications

References 20 publications

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

An Ultrasound Imaging System With On-Chip Per-Voxel RX Beamfocusing for Real-Time Drone Applications

An Improved Lumped Element Model for Circular-Shape pMUTs

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