Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system

Cui, Cunxing; Feng, Qibo; Zhang, Bin

doi:10.1364/ao.54.003122

Cited by 17 publications

(11 citation statements)

References 18 publications

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“…Several non-contact roll angle measurement methods have been reported, including the polarization–modulation method [ 8 , 9 , 10 ], interference method [ 11 , 12 , 13 , 14 , 15 ], and differential position measurement method [ 16 , 17 , 18 , 19 , 20 , 21 ]. The principle behind the polarization–modulation method involves the modulation of the polarization state of the measurement beam through roll angle variation, wherein the roll angle can be calculated based on intensity measurements.…”

Section: Introductionmentioning

confidence: 99%

“…In general, as two corner cubes are used as a combined target, the installation of these cubes is necessary, with the requirement for a large base to fix the targets, which encumbers the system [ 17 ]. In addition, the measurement accuracy of the roll angle is easily affected by the crosstalk error of the other degrees of freedom and the installation error of the two corner cubes [ 18 ]. To improve the compact performance of the system, novel targets have been designed to generate two spatially separated beams [ 19 , 20 ].…”

Section: Introductionmentioning

confidence: 99%

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Grating-Corner-Cube-Based Roll Angle Sensor

Zhou

et al. 2020

Sensors

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This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within ±2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Grating-Corner-Cube-Based Roll Angle Sensor

Zhou

et al. 2020

Sensors

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“…W. Wang developed an integrated geometric error optical measurement system for a three-axis miniaturized machine tool and used a homogeneous transformation matrix to calculate the geometric error of six degrees of freedom [18]. In addition, some researchers have used spectroscopic devices to reduce the number of light sources and pyramid prisms [19,20] or special prisms [21][22][23] as cooperative targets. Q. Feng described a mechanism for improving the measurement resolution of measuring straightness and angular errors [24].…”

Section: Introductionmentioning

confidence: 99%

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

et al. 2020

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A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are ± 2.5 ″ and ± 3.5 ″ without correction, and the residuals are ± 1.9 ″ and ± 2.8 ″ after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from ± 4.8 μ m to ± 2.8 μm and ± 5.9 μm to ± 3.6 μm, respectively. The comparison deviation of the roll is ± 4.3 ″ . The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.

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“…Therefore, it is a time-consuming work to completely measure all geometric motion errors of the linear precision stage using the laser interferometer [ 7 , 11 , 12 ]. In recent years, some measurement systems for simultaneously measuring multi-DOF geometric motion errors of a long linear stage of a machine tool have been developed in the literature [ 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. For example, for contact measurement, Mura proposed a novel measurement device, consisting of six displacement sensors mounted as a parallel mechanism based on the Stewart theory.…”

Section: Introductionmentioning

confidence: 99%

“…The measurement method is based on a combination of laser interferometry and laser fiber collimation. Positioning error measurement was achieved by laser interferometry, and other five-degree-of-freedom (5DOF) geometric motion errors were obtained by fiber collimation measurement [ 28 , 29 , 30 , 31 ]. However, to the best of the current authors’ knowledge, these techniques are very few.…”

Section: Introductionmentioning

confidence: 99%

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Liu

Chen

et al. 2018

Sensors

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This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

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Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system

Cited by 17 publications

References 18 publications

Grating-Corner-Cube-Based Roll Angle Sensor

Grating-Corner-Cube-Based Roll Angle Sensor

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

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