Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion

Li, Jian Ping; Zhou, Xiaoqin; Zhao, Hongwei; Shao, Mingkun; Fan, Zunqiang; Liu, Hui

doi:10.1063/1.4918295

Cited by 48 publications

(28 citation statements)

References 17 publications

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“…Table 4 shows the comparison between the proposed actuator and several existing rotary precision actuators of their presented excellent performances [ 18 , 19 , 20 ]. Although the velocity (steady state: no slip) and output torque that the proposed actuator can achieve are relatively lower, it exhibits several advantages as well.…”

Section: Experiments and Discussionmentioning

confidence: 99%

“…Piezoelectric actuators can work at a resonant state [ 10 , 11 , 12 , 13 , 14 ] or non-resonant state [ 15 , 16 , 17 , 18 , 19 , 20 , 21 ]. From the viewpoint of the connecting form of the piezoelectric element and the stator, the piezoelectric actuators can also be divided into the bonded-type and clamped-type.…”

Section: Introductionmentioning

confidence: 99%

“…Wang et al proposed a novel inertia-driving rotary actuator based on compliant foot driving, and their prototype produced a rotary resolution of 0.24 μrad [ 19 ]. Li et al designed a dual-servo nano-positioning stage, and it achieved a resolution of 1.54 μrad [ 20 ]. Nomura et al developed an inertia-driven micro robot using four PZT stacks, the differences between the static frictional force and the impulsive inertial force caused by the rapid deformations of the PZT elements were used for the movement [ 32 ].…”

Section: Introductionmentioning

confidence: 99%

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A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Liu

Wang

et al. 2018

Sensors

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A four-feet walking-type rotary piezoelectric actuator with minute step motion was proposed. The proposed actuator used the rectangular motions of four driving feet to push the rotor step-by-step; this operating principle was different with the previous non-resonant actuators using direct-driving, inertial-driving, and inchworm-type mechanisms. The mechanism of the proposed actuator was discussed in detail. Transient analyses were accomplished by ANSYS software to simulate the motion trajectory of the driving foot and to find the response characteristics. A prototype was manufactured to verify the mechanism and to test the mechanical characteristics. A minimum resolution of 0.095 μrad and a maximum torque of 49 N·mm were achieved by the prototype, and the output speed was varied by changing the driving voltage and working frequency. This work provides a new mechanism for the design of a rotary piezoelectric actuator with minute step motion.

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Section: Experiments and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Liu

Wang

et al. 2018

Sensors

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“…Table 1 compares the present actuators with those in the literature [15,31,35,36]. The concerned itemsmainly include resolution, maximumsize, drive voltage, andmaximumoutput speed.…”

Section: Methodsmentioning

confidence: 99%

Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack

Huang

Wang

2019

Micromachines

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The working principle of a rotating micro-actuator based on a piezoelectric stack was theoretically analyzed and experimentally verified. The actuator is compact in structure, and the key component is the shearing piezoelectric stack. The piezoelectric stack is used to drive the micro-rotor via an electromechanical transition, which produces high-speed rotation of the micro-rotor. We first established the dynamic model of the micro-actuator and numerically analyzed the motion of this model. The step displacement output was observed by simulation, and the step increment is quite large. For experimental verification, we fabricated the piezoelectric micro-actuator with a size of 12 mm × 10 mm × 8 mm and mass of 4.12 g and conducted a series of experiments. The results show qualitative agreement with the theoretical results; the maximum output speed of the micro-actuator is 5.86 × 10 5 μ rad/s, and the motion resolution is 0.64 μ rad, which is greater than that of most traditional piezoelectric actuators. The proposed micro-actuator offers superior performance in driving of selected small objects, such as in micro-/nano-processing and cell operation.

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“…Three major types of actuators are used in nanopositioning: worm-gears (Ito et al, 2015; Protopopov, 2014), electromagnetic actuators (Teo et al, 2015; Verma et al, 2006) and piezoelectric actuators. The latter type of actuators are made of piezoelectric materials and in use for precise positioning since 1980s (Bazghaleh et al, 2013a; Li et al, 2015; Marth, 1989; Mohammadzaheri et al, 2013; Xu, 2015).…”

Section: Introductionmentioning

confidence: 99%

A review of charge methods for driving piezoelectric actuators

Bazghaleh

Grainger

Mohammadzaheri

2017

Journal of Intelligent Material Systems and Structures

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Piezoelectric actuators are the most commonly used actuators in nanopositioning. They provide excellent operating bandwidth and precision. These actuators are normally driven by voltage amplifiers; however, the relationship of the applied voltage on the actuator and its position is nonlinear and complex due to phenomena such as hysteresis. This adversely influences actuator’s position control which is the core component of nanopositioning. However, the electrical charge applied on a piezoelectric actuator has a significantly less complex relationship with its position. As a result, driving piezoelectric actuators with charge amplifiers has attracted significant attention. In this article, charge driving methods are classified, and their advantages, major issues and the solutions to these issues are critically reviewed.

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Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion

Cited by 48 publications

References 17 publications

A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack

A review of charge methods for driving piezoelectric actuators

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