1985
DOI: 10.1109/t-ed.1985.22236
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Three-dimensional device simulator Caddeth with highly convergent matrix solution algorithms

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Cited by 77 publications
(5 citation statements)
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“…Our new methodology is implemented in the 3D process simulator, SPIRIT-IIIIADL. Our 3D-TCAD system composed of SPIRIT-IIUADL and our in-house device simulator CADDETH3 [4] was applied to the design of 3D-shaped power MOSFETs [5] and we confirmed that this TCAD system can be efficiently applied.…”
Section: Introductionmentioning
confidence: 82%
“…Our new methodology is implemented in the 3D process simulator, SPIRIT-IIIIADL. Our 3D-TCAD system composed of SPIRIT-IIUADL and our in-house device simulator CADDETH3 [4] was applied to the design of 3D-shaped power MOSFETs [5] and we confirmed that this TCAD system can be efficiently applied.…”
Section: Introductionmentioning
confidence: 82%
“…The electric field, F, is the maximum electric field around the gate edge obtained by carrying out three-dimensional (3D) device simulator with CADDETH. 24) Figure 3 shows the comparison between the model and the experimental results of the leakage current, I L , as the function of V j . For model calculations, we use the values as T ¼ 85 C, E t ¼ 0:62 eV, and F from the device simulation.…”
Section: Modeling Of the Leakage Currentmentioning
confidence: 99%
“…The simulation results by a three device simulator are compared with electron which should is iniected into the floating g'ate. The potential and electric field distribution in the channel reg:ion of FIB-EPROM device are simulated by the three dimensional device simulator, CADDETH (4).…”
Section: Imens Ionalmentioning
confidence: 99%