Divinyl tetramethyl disiloxane (DVS), hexamethyl disilazane (HMDS), and methyl trimethoxysilane (MTS) polymer films were deposited on p‐type silicon substrates using plasma‐enhanced chemical vapor deposition (PECVD) processing. The deposition process was implemented in a parallel‐plate, capacitively coupled plasma deposition system. Excellent film thickness and refractive index uniformity
false(normalstd dev=2–3%false)
were obtained. The deposition kinetics were studied as a function of process parameters such as pressure, power, density, and substrate temperature. The polymer film's physical properties were characterized by Fourier transformed infrared (FTIR), electron spectroscopy for chemical analysis (ESCA), Auger spectroscopy, electron spin resonance (ESR), and plasma etching. These polymer films were used as an intermediate oxygen etch resistance layer in trilevel resist lithography to produce submicron image patterns (≃ 0.7 μm lines and spaces) using step and repeat photolithography.
Articles you may be interested inHigh accuracy UV-nanoimprint lithography step-and-repeat master stamp fabrication for wafer level camera application J.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.