Generating electric power with a MEMS electroquasistatic induction turbine-generator

A microfluidic-electric package for power MEMS generators

“…In spite of the fabrication challenges, several successful approaches to power generation have been demonstrated. Steyn et al have fabricated a MEMS electroquasistatic induction turbine-generator, and demonstrated a maximum output power of 192µW under driven excitation [1]. Holmes et al have integrated a 7.5mm diameter permanent-magnet generator, an axial-flow polymer turbine, and a silicon-based package, and achieved an output power of 1.1mW at a rotational speed of 30,000rpm, which corresponds to an input flow rate of 35L/min, and a pressure of 0.8kPa [2].…”

“…The rotating system of high power density generators must be supported by low friction bearings in order to achieve such speeds. One approach is to consider microfabricated air bearings as described in [1]. Recent research efforts on the integration of more conventional metal ball bearings into microfabricated systems for high-speed applications are promising [3].…”